Electronic device
View Patent ↗The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate. The MEMS element includes a first electrode and a second electrode, that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode is separated from the first electrode by an air gap in its first position. The movable element includes a mechanical layer and an intermediate layer, in which the second electrode is defined. The second electrode is constituted by a plurality of sections in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect to the mechanical layer.
1. An electronic device comprising a micro-electromechanical systems (MEMS) element, the MEMS element comprising:
a first electrode;
a movable element comprising a mechanical layer and a second electrode, the second electrode movable towards and from the first electrode between a first position and a second position, the second electrode being separated from the first electrode by a gap in its first position,
wherein the second electrode comprises a plurality of segments in a plane parallel to a main plane of the first electrode, each of the segments being mechanically connected by a separate vertical interconnect to the mechanical layer, wherein each vertical interconnect has, in a plane parallel with a main surface of the movable element, a horizontal cross-sectional area that is smaller than a horizontal cross-section area of a section of the second electrode that is connected thereto.
2. The electronic device as claimed in claim 1 , wherein the movable element includes at least one etch hole that extends through the mechanical layer and one segment in the second electrode.
3. The electronic device as claimed in claim 2 , wherein the MEMS element is provided with a venting channel in the second position, the venting channel including venting channel spaces between the segments and the interconnects.
4. The electronic device as claimed in claim 1 , further comprising one or more flexible elements between the movable element and one or more protrusions on a substrate, the flexible element coupled to provide a force on the movable element.
5. The electronic device as claimed in claim 1 , wherein the MEMS element further comprises at least one anti stiction bump.
6. The electronic device as claimed in claim 1 , wherein the MEMS element further comprises at least one actuation electrode.
7. The electronic device as claimed in claim 1 , wherein the segments of the second electrode and the mechanical layer comprise different materials.
8. The electronic device as claimed in claim 1 , further comprising a thin-film capacitor adjacent to the MEMS element.
9. The electronic device as claimed in claim 8 , wherein the first electrode of the MEMS element is formed on a substrate, the thin-film capacitor comprising:
a first capacitor electrode on the substrate;
a second capacitor electrode defined in the second electrode layer; and
a layer of dielectric material between the first capacitor electrode and the second capacitor electrode.
10. The electronic device as claimed in claim 1 , wherein the mechanical layer comprises a metal.
11. The electronic device as claimed in claim 1 , further comprising a flexible element attached to the movable element.
12. The electronic device as claimed in claim 1 , wherein the movable element comprises a movable segment that is connected to a segment of the second electrode via the vertical interconnect connected to that segment of the second electrode.
13. A micro-electromechanical systems (MEMS) element, comprising:
a substrate;
a first electrode disposed on the substrate;
a movable element disposed over the substrate and movable towards and from the substrate;
at least three second electrodes disposed on the movable element, wherein the three second electrodes are in a plane parallel to a main plane of the first electrode and separated from each other, each second electrode overlying the first electrode, the second electrodes movable towards and from the first electrode between a first position and a second position, the second electrodes being separated from the first electrode by a gap in its first position; and
at least three vertical interconnects, each vertical interconnect mechanically connecting a respective second electrode to the movable element, wherein each vertical interconnect has, in a plane parallel with a main surface of the movable element, a horizontal cross-sectional area that is smaller than a horizontal cross-section area of one of the second electrodes that is connected thereto.
14. The MEMS element as claimed in claim 13 , wherein the second electrodes are disposed at a central portion of the movable element.
15. The MEMS element as claimed in claim 14 , further comprising a first anti-stiction bump at a first end of the movable element and a second anti-stiction bump at a second end of the movable element, the central portion located between the first end and the second end.
16. The MEMS element as claimed in claim 13 , further comprising first and second actuation electrodes disposed on the movable element.
17. The MEMS element as claimed in claim 16 , wherein the second electrodes are located between the first actuation electrode and the second actuation electrode.
18. The MEMS element as claimed in claim 13 , further comprising at least one protrusion extending from the substrate, the movable element being connected to the protrusion by a flexible element.