Semiconductor device that includes transistors formed on different silicon surfaces
View Patent ↗According to the present invention, it is possible to isolate elements from each other without formation of STI and integrate the elements at a high density. A step is formed on a surface of a silicon substrate so as to provide different surfaces. Transistors are formed on the respective different surfaces. The transistors are insulated from each other by a silicon layer and an insulating sidewall. Since no STI is formed between the transistors, it is possible to integrate the transistors at a high density.
1. A semiconductor device comprising:
a first transistor formed on a first silicon surface; and
a second transistor formed on a second silicon surface located at a height different from a height of the first silicon surface, said first transistor and said second transistor being insulated from each other by a well of a first conductivity type buried beneath the second silicon surface and separated from the second transistor by a silicon layer.
2. The semiconductor device as recited in claim 1 , further comprising:
a silicon substrate having a surface forming the first silicon surface; and
a sidewall of an insulator film on a side surface of the silicon layer,
wherein the silicon layer is on a surface of said silicon substrate and has a surface forming the second silicon surface located higher than the first silicon surface.
3. The semiconductor device as recited in claim 1 , including no STI provided between said first transistor and said second transistor.
4. The semiconductor device as recited in claim 1 , wherein the well has a portion at a height above the height of the first silicon surface.
5. A semiconductor device comprising:
a first transistor formed on a first silicon surface;
a second transistor formed on a second silicon surface located at a height different from a height of the first silicon surface, said first transistor and said second transistor being insulated from each other;
a lower transistor group including a plurality of said first transistors; and
an upper transistor group including a plurality of said second transistors,
wherein the first silicon surface and the second silicon surface are arranged alternately in a row direction and a column direction perpendicular to each other in a plan view,
wherein said first transistors on the first silicon surface and said second transistors on the second silicon surface are staggered in the plan view.
6. The semiconductor device as recited in claim 5 , further comprising a sidewall of an insulator film between a region for said second transistor formed on the second silicon surface and a region for said first transistor formed on the first silicon surface.
7. The semiconductor device as recited in claim 6 , wherein each of said first transistor and said second transistor comprises a MOS transistor having the same conductivity.
8. The semiconductor device as recited in claim 7 , wherein each of said first transistors in said lower transistor group includes a first gate portion having stacked partial gates,
wherein each of said second transistors in said upper transistor group includes a second gate portion having a single stage structure.
9. The semiconductor device as recited in claim 8 , wherein an upper surface of said first gate portion in each of said first transistors and an upper surface of said second gate portion in each of said second transistors are located on substantially the same plane.
10. The semiconductor device as recited in claim 9 , further comprising a common gate electrode formed on the same plane as said upper surfaces of said first gate portions and said second gate portions so as to interconnect said first gate portions and said second gate portions of said first transistors and said second transistors arranged alternately in the column direction.
11. The semiconductor device as recited in claim 10 , further comprising a p-type silicon substrate forming the first silicon surface,
wherein each of said first transistors and said second transistors comprises an NMOS transistor.
12. The semiconductor device as recited in claim 6 , wherein said first transistors and said second transistors comprise CMOS transistors formed by different conductive types of transistors.
13. The semiconductor device as recited in claim 12 , wherein each of said first transistors in said lower transistor group includes a first gate portion having stacked partial gates,
wherein each of said second transistors in said upper transistor group includes a second gate portion having a single stage structure.
14. The semiconductor device as recited in claim 13 , wherein an upper surface of said first gate portion in each of said first transistors and an upper surface of said second gate portion in each of said second transistors are located on substantially the same plane.
15. The semiconductor device as recited in claim 14 , further comprising a common gate electrode formed on the same plane so as to interconnect said first gate portions and said second gate portions of said first transistors and said second transistors arranged alternately in the column direction.
16. The semiconductor device as recited in claim 15 , further comprising a p-type silicon substrate forming the first silicon surface,
wherein each of said first transistors comprises an NMOS transistor,
wherein each of said second transistors comprises a PMOS transistor.
17. A semiconductor device comprising:
a silicon substrate;
a first transistor formed on said silicon substrate;
a silicon layer adjacent to said first transistor on a surface of said silicon substrate;
a second transistor formed on said silicon layer so as to be isolated from said first transistor by said silicon layer; and
a sidewall of an insulator film formed on a side surface of said silicon layer.
18. The semiconductor device as recited in claim 17 , wherein a first distance between an edge of a first gate portion of said first transistor and said sidewall is substantially the same as a second distance between an edge of a second gate portion of said second transistor and said sidewall.
19. The semiconductor device as recited in claim 18 , further comprising:
a first insulator film covering said first transistor; and
a second insulator film covering said first transistor and said second transistor and having substantially the same height as a height of said first insulator film.