MIM capacitor high-k dielectric for increased capacitance density
View Patent ↗According to one embodiment of the invention, a method for fabricating a MIM capacitor in a semiconductor die includes a step of depositing a first interconnect metal layer. The method further includes depositing a high-k dielectric layer comprising AlN X (aluminum nitride) on the first interconnect layer. The method further includes depositing a layer of MIM capacitor metal on the high-k dielectric layer. The method further includes etching the layer of MIM capacitor metal to form an upper electrode of the MIM capacitor. According to this exemplary embodiment, the first interconnect metal layer, the high-k dielectric layer, and the layer of MIM capacitor metal can be deposited in a PVD process chamber. The method further includes etching the high-k dielectric layer to form a MIM capacitor dielectric segment and etching the first interconnect metal layer to form a lower electrode of the MIM capacitor.
1. A MIM capacitor in a semiconductor die, said MIM capacitor comprising:
a lower electrode of said MIM capacitor, said lower electrode of said MIM capacitor being situated in a first interconnect metal layer in said semiconductor die;
a MIM capacitor high-k dielectric segment situated on said lower electrode of said MIM capacitor;
an upper electrode of said MIM capacitor situated on said MIM capacitor high-k dielectric segment;
wherein said MIM capacitor high-k dielectric segment is selected from the group consisting of AlN and AlN 2 , wherein said upper electrode of said MIM capacitor comprises at least two metal layers.
2. The MIM capacitor of claim 1 wherein said MIM capacitor high-k dielectric segment has a thickness of between approximately 200.0 Angstroms and approximately 350.0 Angstroms.
3. The MIM capacitor of claim 1 wherein an interlayer dielectric layer is situated over said upper electrode of said MIM capacitor.
4. The MIM capacitor of claim 3 wherein an interconnect metal segment is situated on said interlayer dielectric layer, said interconnect metal segment being situated in a second interconnect metal layer of said semiconductor die.
5. The MIM capacitor of claim 4 wherein said interconnect metal segment is connected to said upper electrode of said MIM capacitor by at least one via.
6. The MIM capacitor of claim 1 wherein said MIM capacitor high-k dielectric segment has a dielectric constant of at least 10.0.
7. The MIM capacitor of claim 3 wherein said interlayer dielectric layer comprises a low-k dielectric.
8. The MIM capacitor of claim 3 wherein said upper electrode of said MIM capacitor has a thickness of approximately 1500.0 Angstroms.
9. The MIM capacitor of claim 1 wherein said upper electrode of said MIM capacitor comprises a layer of aluminum situated on a layer of titanium nitride.
10. The MIM capacitor of claim 1 wherein said upper electrode of said MIM capacitor comprises a layer of aluminum situated between layers of titanium nitride.
11. A MIM capacitor in a semiconductor die, said MIM capacitor comprising:
a lower electrode of said MIM capacitor, said lower electrode of said MIM capacitor being situated in a first interconnect metal layer in said semiconductor die;
a MIM capacitor high-k dielectric segment situated on said lower electrode of said MIM capacitor;
an upper electrode of said MIM capacitor situated on said MIM capacitor high-k dielectric segment;
wherein said MIM capacitor high-k dielectric segment comprises AlN x , wherein said upper electrode of said MIM capacitor comprises at least two metal layers.
12. The MIM capacitor of claim 11 wherein said AlN x is selected from the group consisting of AlN and AlN 2 .
13. The MIM capacitor of claim 11 wherein a ratio of aluminum to nitrogen in said AlN x is between 1:1 and 1:2.
14. The MIM capacitor of claim 11 wherein said upper electrode of said MIM capacitor is formed in an interlayer dielectric layer.
15. The MIM capacitor of claim 14 wherein said interlayer dielectric layer comprises a low-k dielectric.
16. The MIM capacitor of claim 11 wherein said MIM capacitor high-k dielectric segment has a thickness of between approximately 200.0 Angstroms and approximately 350.0 Angstroms.
17. The MIM capacitor of claim 14 wherein an interconnect metal segment is situated on said interlayer dielectric layer, said interconnect metal segment being situated in a second interconnect metal layer of said semiconductor die.
18. The MIM capacitor of claim 17 wherein said interconnect metal segment is connected to said upper electrode of said MIM capacitor by at least one via.
19. The MIM capacitor of claim 11 wherein said MIM capacitor high-k dielectric segment has a dielectric constant of at least 10.0.
20. The MIM capacitor of claim 11 wherein said upper electrode of said MIM capacitor comprises a layer of aluminum and at least one layer of titanium nitride.