Cleaning solution and cleaning method of a semiconductor device
View Patent ↗A cleaning method for removing foreign bodies during the fabrication of semiconductor devices including treating a substrate with a cleaning solution including an oxidizer to form a chemical oxide layer and then removing the chemical oxide layer, thereby removing foreign bodies from a surface of the semiconductor substrate. Accordingly, the foreign bodies can be substantially removed from the surface of the substrate without corroding a metal.
1. A method of removing foreign bodies from a surface of a thin film formed on a substrate during a process for fabricating a semiconductor device, comprising:
forming an oxide layer by oxidizing the surface of the thin film by treating the substrate with an aqueous solution comprising an iodine based oxidizer, wherein the iodine based oxidizer is selected from the group consisting of ammonium iodine oxide, potassium iodine oxide, lithium iodine oxide, calcium iodine oxide, barium iodine oxide, potassium iodine, ammonium iodine or any combination thereof; and
removing the oxide layer.
2. The method of claim 1 , further comprising, after removing the oxide layer:
treating the substrate with an aqueous solution comprising an oxidizer.
3. The method of claim 1 , wherein removing the oxide layer comprises treating the substrate with the oxide layer with a solution comprising a fluorine based deoxidizer, a surface charge controlling agent and a deionized water.
4. The method of claim 3 , wherein the fluorine based deoxidizer is hydrofluoric acid, hydroboron tetrafluoric acid, ammonium fluoride or any combination thereof, and
wherein the surface charge controlling agent is an organic acid, a suirfactant or any combination thereof.
5. The method of claim 4 , wherein the organic acid is citric acid, a tricarboxylic acid, tartaric acid, succinic acid, malic acid, aspartic acid, glutaric acid, adipic acid, suberic acid, oxalic acid, acetic acid, fumaric acid or any combination thereof.
6. The method of claim 1 wherein the thin film is formed of a metal, a metal nitride, a metal silicide or a polysilicon.
7. A cleaning method comprising:
treating a substrate with an acuteous first solution consisting essentially of an oxidizer;
rinsing the substrate with deionized water to remove the aqueous first solution consisting essentially of the oxidizer;
drying the substrate; and
treating the substrate with a second solution consisting essentially of a surface charge controlling agent, a fluorine based deoxidizer and deionized water, wherein the oxidizer is an iodine based oxidizer selected from the group consisting of ammonium iodine oxide, potassium iodine oxide, lithium iodine oxide, calcium iodine oxide, barium iodine oxide, potassium iodine, ammonium iodine or any combination thereof.