Composition and method for photoresist removal
View Patent ↗The present invention is a composition for removal of multi-layer photoresist layers on an electronic device substrate for rework of the photoresist on the substrate, comprising; (i) a solvent blend of at least three discrete solvents, (ii) at least one organic sulfonic acid, and (iii) at least one corrosion inhibitor. The present invention is also a method for using the composition. This composition and method succeed in removing such multi-layer photoresist at temperatures less than 65° C. and in contact times under three minutes, allowing high throughput on single wafer tools.
1. A nonaqueous, nonfluoride-containing composition capable of removal of multi-layer photoresist layers on an electronic device substrate for rework of the photoresist on the substrate at no greater than 65° C. and contact time no greater than 3 minutes, consisting essentially of; (i) at least one non-polymeric glycol ether solvent, (ii) at least one non-aromatic alcohol solvent, (iii) at least one solvent selected from the group consisting of an aromatic alcohol and a glycol (iv) at least one organic sulfonic acid, and (v) at least one corrosion inhibitor.
2. The composition of claim 1 wherein the (iii) solvent is selected from the group consisting of propylene glycol and benzyl alcohol.
3. The composition of claim 1 wherein the organic sulfonic acid is selected from the group consisting of:
R 1 SO 3 H
wherein R 1 denotes an alkyl group having 1-4 carbons;
R 2 -A-SO 3 H
wherein R 2 denotes an alkyl group having 1 to 16 carbons, and A denotes a phenylene or naphthalene group; and mixtures thereof.
4. The composition of claim 1 wherein the organic sulfonic acid is selected from the group consisting of methanesulfonic acid, ethanesulfonic acid, propanesulfonic acid, butanesulfonic acid, p-toluenesulfonic acid, 4-ethylbenzenesulfonic acid, dodecylbenzenesulfonic acid, cumenesulfonic acid, methylethylbenzenesulfonic acid, isomers of xylenesulfonic acid, benzenesulfonic acid, phenolsulfonic acid, naphthalenesulfonic acid and mixtures thereof.
5. The composition of claim 1 wherein the corrosion inhibitor is selected from the group consisting of thiogycerol, mercaptoethanol, mercaptobenzodiazole, gallic acid, 1-[(2-hydroxyethyl)thio]-3-(octyloxy)-2-propanol and mixtures thereof.
6. A composition for removal of multi-layer photoresist layers on an electronic device substrate for rework of the photoresist on the substrate, consisting essentially of; di(proplyene glycol) methyl ether, p-toluenesulfonic acid, tetrahydrofurfuryl alcohol, benzyl alcohol, 1-[(2-hydroxyethyl)thio]-3-(octyloxy)-2-propanol and gallic acid.
7. A composition capable of removal of multi-layer photoresist layers on an electronic device substrate for rework of the photoresist on the substrate at no greater than 65° C. and contact time no greater than 3 minutes, consisting essentially of; di(proplyene glycol) methyl ether, p-toluenesulfonic acid, tetrahydrofurfuryl alcohol, propylene glycol and thioglycerol.
8. A composition capable of removal of multi-layer photoresist layers on an electronic device substrate for rework of the photoresist on the substrate at no greater than 65° C. and contact time no greater than 3 minutes, consisting essentially of; di(proplyene glycol) methyl ether, p-toluenesulfonic acid, tetrahydrofurfuryl alcohol, propylene glycol and gallic acid.
9. A method for removal of multi-layer photoresist layers on an electronic device substrate for rework of the photoresist on the substrate, comprising contacting the multi-layer photoresist layers on the electronic device substrate at a temperature of no greater than 65° C. and contact time no greater than 3 minutes with a nonaqueous, nonfluoride-containing photoresist stripper composition, consisting essentially of (i) at least one non-polymeric glycol ether solvent, (ii) at least one non-aromatic alcohol solvent, (iii) at least one solvent selected from the group consisting of an aromatic alcohol and a glycol, (iv) at least one organic sulfonic acid, and (v) at least one corrosion inhibitor.
10. The method of claim 9 wherein the contacting is conducted on a single wafer tool.
11. The method of claim 9 wherein the (iii) solvent is selected from the group consisting of propylene glycol, and benzyl alcohol.
12. The method of claim 9 wherein the organic sulfonic acid is selected from the group consisting of:
R 1 SO 3 H
wherein R 1 denotes an alkyl group having 1-4 carbons;
R 2 -A-SO 3 H
wherein R 2 denotes an alkyl group having 1 to 16 carbons, and A denotes a phenylene or naphthalene group; and mixture thereof.
13. The method of claim 9 wherein the organic sulfonic acid is selected from the group consisting of methanesulfonic acid, ethanesulfonic acid, propanesulfonic acid, butanesulfonic acid, p-toluenesulfonic acid, 4-ethylbenzenesulfonic acid, dodecylbenzenesulfonic acid, cumenesulfonic acid, methylethylbenzenesulfonic acid, isomers of xylenesulfonic acid, benzenesulfonic acid, phenolsulfonic acid, naphthalenesulfonic acid and mixtures thereof.
14. The method of claim 9 wherein the corrosion inhibitor is selected from the group consisting of thioglycerol, mercaptoethanol, mercaptobenzodiazole, 1-[(2-hydroxyethyl)thio]-3-(octyloxy)-2-propanol, gallic acid and mixtures thereof.