III-V group nitride system semiconductor self-standing substrate, method of making the same and III-V group nitride system semiconductor wafer

1. A method of making a III-V group nitride system semiconductor self-standing substrate, said method comprising:

forming a GaN layer and a Ti thin film on an upper layer of a hetero-substrate in this order, thermally treating the substrate with the GaN layer to form a void-formed GaN layer by generating voids in the GaN layer and a hole-formed TiN layer by nitriding the Ti thin film;

growing a III-V group nitride system semiconductor crystal thereon by a Hydride Vapor Phase Epitaxy (HVPE) method while generating a plurality of concaves on a crystal growth interface;

flattening the crystal growth interface by growing the III-V group nitride system semiconductor crystal to fill the plurality of concaves, whereby dislocation lines generated in the crystal are gathered while reducing a dislocation density of an entire III-V group nitride system semiconductor crystal, to form a first III-V group nitride system semiconductor crystal layer that comprises a region with dislocation lines gathered densely, the dislocation lines being gathered substantially perpendicular to a surface of the substrate, and a region with dislocation lines gathered thinly;

subsequently growing the crystal while keeping the crystal growth interface flattened, whereby a transitional layer is formed that the dislocation lines once gathered are uniformly dispersed again in the crystal, and a second III-V group nitride system semiconductor crystal layer is formed with a thickness of 10 μm or more on the transitional layer, the second III-V group nitride system semiconductor crystal layer having a low dislocation density and a substantially uniform dislocation density distribution; and

separating the III-V group nitride system semiconductor crystal grown on the hetero-substrate from the hetero-substrate.

2. The method of making a III-V group nitride system semiconductor self-standing substrate according to claim 1 , wherein the second III-V group nitride system semiconductor crystal layer is grown thick and

wherein the method further comprising comprises:

cutting the second III-V group nitride system semiconductor crystal layer in a direction perpendicular to a growth direction of the crystal to obtain the substrate.

3. The method of making a III-V group nitride system semiconductor self-standing substrate according to claim 1 , wherein:

the flattening is conducted such that a concentration of hydrogen in growth atmosphere gas is increased in a process of the crystal growth such that the concaves on the crystal growth interface are filled to flatten the crystal growth interface.

4. The method of making a III-V group nitride system semiconductor self-standing substrate according to claim 1 , wherein:

the flattening is conducted such that a partial pressure of III-group source gas is increased in a process of the crystal growth such that the concaves on the crystal growth interface are filled to flatten the crystal growth interface.

5. The method of making a III-V group nitride system semiconductor self-standing substrate according to claim 1 , wherein the growing the III-V group nitride system semiconductor crystal comprises lowering a partial pressure of hydrogen in a carrier gas.

6. The method of making a III-V group nitride system semiconductor self-standing substrate according to claim 1 , wherein the growing the III-V group nitride system semiconductor crystal comprises increasing a V/III ratio.

7. The method of making a III-V group nitride system semiconductor self-standing substrate according to claim 2 , further comprising:

polishing upper and lower surfaces of the substrate obtained by the cutting.

8. The method of making a III-V group nitride system semiconductor self-standing substrate according to claim 4 , wherein the source gas comprises GaCl.