Polishing composition and polishing method
View Patent ↗The present invention aims to provide a polishing composition which allows high-speed polishing of a barrier film and an inter-layer dielectric film along with a wiring metal at the same time, while preventing dishing and erosion, and particularly maintaining the flatness of metal film. The chemical-mechanical polishing composition of the present invention comprises a dicarboxylic acid having 7 to 13 carbon atoms, an oxidizing agent, an abrasive and water.
1. A chemical-mechanical polishing composition, comprising an aliphatic dicarboxylic acid having 8 to 13 carbon atoms in an amount of 0.3 to 10 mass % based on the chemical-mechanical polishing composition, one or more additional acids in an amount of 0.1 mass % or less based on the chemical-mechanical polishing composition, an oxidizing agent, an abrasive and water, and having a pH of 2 to 4.
2. The chemical-mechanical polishing composition according to claim 1 , wherein the dicarboxylic acid is a dicarboxylic acid which does not have an additional hydroxyl group.
3. The chemical-mechanical polishing composition according to claim 1 , wherein the dicarboxylic acid is sebacic acid, tridecanedioic acid, or mixtures thereof.
4. The chemical-mechanical polishing composition according to claim 1 , wherein the oxidizing agent is hydrogen peroxide.
5. The chemical-mechanical polishing composition according to claim 1 , wherein the abrasive is a colloidal silica.
6. The chemical-mechanical polishing composition according to claim 1 , wherein the one or more additional acids comprises at least one selected from the group consisting of a sulfonic acid, a carboxylic acid, an amino acid, sulfuric acid, a phosphoric acid, a phosphonic acid, and nitric acid.
7. The chemical-mechanical polishing composition according to claim 1 , wherein the composition comprises one or more alkali metal ions.
8. The chemical-mechanical polishing composition according to claim 1 , wherein the composition comprises an alkali metal ion, and exclusively comprises, as the contents other than the alkali metal ion, the dicarboxylic acid having 8 to 13 carbon atoms, the oxidizing agent, the abrasive and water.
9. The chemical-mechanical polishing composition according to claim 7 , wherein the alkali metal ion is potassium ion.
10. The chemical-mechanical polishing composition according to claim 1 , wherein the content of the dicarboxylic acid is from 1 to 10 mass % based on the chemical-mechanical polishing composition.
11. The chemical-mechanical polishing composition according to claim 1 , wherein the content of the oxidizing agent is from 0.01 to 30 mass % based on the chemical-mechanical polishing composition.
12. The chemical-mechanical polishing composition according to claim 1 , wherein the content of the abrasive is 30 mass % or less based on the chemical-mechanical polishing composition.
13. A method for polishing a substrate, wherein the method comprises planarizing a substrate by using the chemical-mechanical polishing composition according to claim 1 , the substrate comprising an insulating film having a trench, a barrier film formed on the insulating film, and a wiring material film buried in the trench and covering the barrier film.
14. The polishing method according to claim 13 , wherein the wiring material is copper or a copper alloy.
15. The polishing method according to claim 13 , wherein the insulating film is a film of an inorganic silicon compound or an organic compound.
16. The polishing method according to claim 15 , wherein the inorganic silicon compound is at least one material selected from the group consisting of SiO 2 , SiN, SiNO, SiOC, SiCN and mixtures thereof.
17. The polishing method according to claim 13 , wherein the barrier film is a film of at least one material selected from the group consisting of tantalum, a tantalum alloy, a tantalum compound and mixtures thereof.
18. A kit comprising a plurality of compositions, wherein the plurality of compositions provides the chemical-mechanical polishing composition according to claim 1 when plurality of compositions are mixed together or when plurality of compositions are mixed together and diluted with water.
19. A method for transporting or storing a chemical-mechanical polishing composition, wherein the method comprises utilizing the kit according to claim 1 .