Methods of enhancing capacitors in integrated circuits
View Patent ↗Systems, devices, structures, and methods are described that inhibit dielectric degradation at high temperatures. An enhanced capacitor is discussed. The enhanced capacitor includes a first electrode, a dielectric that includes ditantalum pentaoxide, and a second electrode having a compound. The compound includes a first substance and a second substance. The second electrode includes a trace amount of the first substance. The morphology of the semiconductor structure remains stable when the trace amount of the first substance is oxidized during crystallization of the dielectric. In one embodiment, the crystalline structure of the dielectric describes substantially a (001) lattice plane.
1. A method comprising:
forming a layer of a conductive compound;
crystallizing the layer to form ruthenium dioxide and ruthenium; and
forming a dielectric over the layer.
2. The method of claim 1 , wherein the conductive compound includes RuO x , wherein the x is indicative of a number of atoms.
3. The method of claim 1 , wherein the dielectric includes ditantalum pentaoxide.
4. The method of claim 1 , wherein the layer is formed at about 210 degrees Celsius.
5. The method of claim 1 , wherein the layer is formed with about 200 standard cubic centimeters per minute (sccm) of Ru-HEC.
6. The method of claim 5 , wherein the layer is formed with about 250 standard cubic centimeters per minute (sccm) of O 2 .
7. The method of claim 6 , wherein the layer is formed at a pressure of about 2.5 torrs.
8. A method comprising:
forming a conductive layer of ruthenium and oxygen;
crystallizing the conductive layer to form RuO 2 and Ru;
forming a layer of Ta 2 O 5 over the conductive layer; and
crystallizing the layer of Ta 2 O 5 to form crystallized Ta 2 O 5 .
9. The method of claim 8 , wherein forming the conductive layer includes a chemical vapor deposition.
10. The method of claim 8 , wherein crystallizing the conductive layer includes crystallizing at a temperature greater than about 750 degrees Celsius and less than about 800 degrees Celsius.
11. The method of claim 8 , wherein crystallizing the conductive layer includes crystallizing in an ambient of nitrogen.
12. The method of claim 8 , wherein crystallizing to form crystallized Ta 2 O 5 layer includes crystallizing at a temperature of about 800 degrees Celsius.
13. The method of claim 8 , wherein crystallizing to form crystallized Ta 2 O 5 includes crystallizing in an ambient of oxygen.
14. The method of claim 8 , wherein the crystallized Ta 2 O 5 includes permittivity greater than about 25.
15. A method comprising:
forming a transistor; and
forming a capacitor coupled to the transistor, wherein forming the capacitor includes forming a capacitor plate having a conductive compound, crystallizing the capacitor plate to form ruthenium dioxide and ruthenium, and forming a dielectric over the capacitor plate.
16. The method of claim 15 , wherein the dielectric directly contacts the capacitor plate.
17. The method of claim 16 comprising:
forming an additional capacitor plate, wherein the additional capacitor plate directly contacts the dielectric.
18. The method of claim 17 , wherein the dielectric includes ditantalum pentaoxide.
19. The method of claim 17 , wherein the additional capacitor plate includes one of TIN, TiON, WN x , TaN, Ta, Pt, Pt-Rh, Pt-RhO x , Ru, RuOx, Ir, IrO x , Pt-Ru, Pt-RuO x , Pt-Ir, Pt-IrO x , SrRuO 3 , Au, Pd, Al, Mo, Ag, and Poly-Si.
20. A method comprising:
forming a transistor; and
forming a capacitor coupled to the transistor, wherein forming the capacitor includes forming a conductive layer of ruthenium and oxygen, crystallizing the conductive layer to form RuO 2 and Ru, and forming a crystallized layer of Ta 2 O 5 over the conductive layer.
21. The method of claim 20 , wherein the crystallized Ta 2 O 5 includes substantially a (001) lattice plane.
22. The method of claim 20 , wherein the crystallized layer of Ta 2 O 5 directly contacts the conductive layer.
23. The method of claim 22 comprising:
forming an additional conductive layer, wherein the additional conductive layer directly contacts the crystallized layer of Ta 2 O 5 .
24. The method of claim 20 , wherein crystallizing the conductive layer includes crystallizing at a temperature greater than about 750 degrees Celsius.
25. The method of claim 20 , wherein forming the crystallized Ta 2 O 5 includes crystallizing a layer of Ta 2 O 5 to form the crystallized Ta 2 O 5 after the conductive layer is crystallized.
26. The method of claim 25 , wherein crystallizing the layer of Ta 2 O 5 includes crystallizing in an ambient of dinitrogen oxide.