Lid structure for microdevice and method of manufacture
View Patent ↗A system and a method are described for forming features at the bottom of a cavity in a substrate. Embodiments of the systems and methods provide an infrared transmitting, hermetic lid for a microdevice. The lid may be manufactured by first forming small, subwavelength features on a surface of an infrared transmitting substrate, and coating the subwavelength features with an etch stop material. A spacer wafer is then bonded to the infrared transmitting substrate, and a device cavity is etched into the spacer wafer down to the etch stop material, exposing the subwavelength features. The etch stop material may then be removed, and the microdevice enclosed in the device cavity, by bonding the device wafer to the lid.
1. A structure for a microdevice, comprising: a first substrate with a first plurality of features formed on a surface of the first substrate; a spacer wafer bonded to the first substrate with a cavity formed in the spacer wafer to expose at least some of the plurality of features to the environment of the cavity; and an etch stop material disposed between the first substrate and the spacer wafer; and a second substrate bonded to the first substrate and the spacer wafer, with a microdevice formed on the second substrate and disposed in the cavity of the spacer wafer.
2. The structure of claim 1 , further comprising: a second plurality of features formed on an opposite surface of the first substrate, external to the cavity formed in the spacer wafer.
3. The structure of claim 1 , wherein the first plurality of features are substantially circular depressions between about 1 um and about 2 um wide and about 2 um deep, arranged in a hexagonal, close-packed array.
4. The structure of claim 1 , wherein one surface of the etch stop material is in a same plane as a top surface of the plurality of features formed on the surface of the substrate.
5. The structure of claim 1 , wherein the etch stop material is recessed by at least about 5 um relative to a sidewall of the cavity defined by the spacer wafer.
6. The microdevice of claim 1 , wherein the microdevice is at least one of an infrared emitting device and an infrared detecting device which emits or detects a wavelength of infrared radiation, and the first substrate comprises a material which is substantially transmitting to infrared radiation, and wherein the first plurality of features has a characteristic dimension smaller than the wavelength.
7. The microdevice of claim 6 , wherein the etch stop material is disposed only on portions of the first substrate which are covered by the spacer wafer and wherein the etch stop material has an etch rate which is substantially slower than the spacer wafer when subjected to ion etching.
8. The microdevice of claim 1 , wherein the second substrate is bonded to the structure with an adhesive that forms a hermetic seal that seals a vacuum environment within the cavity.
9. The structure of claim 1 , wherein the etch stop material comprises at least one of silicon dioxide (SiO 2 ), gold (Au), nickel (Ni), chromium (Cr), titanium (Ti), tungsten (W), titanium-tungsten alloy (TiW) and silicon nitride (Si 3 N 4 ).