Dual substrate MEMS plate switch and method of manufacture
View Patent ↗Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.
1. A method for manufacturing an electrostatic MEMS device, comprising:
providing a silicon-on-insulator substrate including a silicon device layer, and insulating layer and a silicon handle layer;
forming a first plate in the device layer of the silicon-on-insulator substrate and suspended adjacent to the handle layer of the silicon-on-insulator substrate, wherein the first plate is coupled to the silicon-on-insulator substrate by a plurality of spring beams;
forming at least one electrical contact on a second substrate, wherein the first plate is configured to move toward the at least one electrical contact; and
coupling the device layer of the silicon-on-insulator substrate to the second substrate with a seal that seals the MEMS device.
2. The method of claim 1 , further comprising:
forming at least one shunt bar on the first plate, disposed substantially on a nodal line of a vibrational mode of the first plate; and
forming an electrostatic second plate on the second substrate, adjacent to the first plate.
3. The method of claim 2 , wherein forming the electrostatic second plate and the at least one electrical contact further comprises:
depositing a seed layer over the second substrate;
depositing a conductive material over the seed layer; and
patterning the electrostatic second plate and the at least one electrical contact from the conductive material.
4. The method of claim 1 , further comprising:
forming at least one electrical via through a thickness of the second substrate;
electrically coupling the at least one electrical via to the at least one electrical contact, and
electrically coupling the at least one via to the plate.
5. The method of claim 4 , wherein forming the at least one electrical via comprises:
forming at least one blind hole with a dead end wall on a front side of the second substrate;
forming a seed layer in the at least one blind hole;
depositing a conductive material onto the seed layer; and
removing material from a rear side of the second substrate to remove the dead-end wall of the at least one blind hole.
6. The method of claim 5 , wherein depositing a conductive material onto the seed layer comprises plating copper onto the seed layer.
7. The method of claim 1 , wherein coupling the first substrate to the second substrate with a seal comprises:
depositing a first metal between the first substrate and the second substrate; and
depositing a second metal between the first substrate and the second substrate; and
coupling the first substrate to the second substrate by heating the first metal and the second metal to at least a melting point of at least one of the first metal and the second metal, to form a substantially hermetic alloy seal around the MEMS device.
8. The method of claim 1 , wherein the first substrate comprises a silicon-on-insulator substrate, and the second substrate comprises at least one of a silicon wafer and a silicon-on-insulator substrate.
9. The method of claim 8 , wherein forming the first plate suspended over the first substrate comprises:
etching a plurality of holes into a device layer of the silicon-on-insulator substrate;
etching a dielectric layer beneath the device layer of the silicon-on-insulator substrate through the plurality of holes; and
etching an outline of the first plate in the device layer of the silicon-on-insulator substrate.
10. An electrostatic MEMS device, comprising:
a silicon-on-insulator substrate including a silicon device layer, an insulating layer and a silicon handle layer;
a first plate formed in the device layer of the silicon-on-insulator substrate, and suspended adjacent to the handle layer of the silicon-on-insulator substrate, the first suspended plate being coupled to the silicon-on-insulator substrate by a plurality of spring beams;
at least one electrical contact formed on a second substrate, wherein the first plate is configured to move toward the at least one electrical contact; and
a seal which couples the device layer of the silicon-on-insulator substrate to the second substrate, and seals the MEMS device.
11. The electrostatic MEMS device of claim 10 , wherein the plurality of spring beams comprises at least two spring beams, at least one of the two spring beams disposed on one side of the first plate, and at least one other of the at least two spring beams disposed on an opposite side of the first plate, wherein each spring beam has a segment extending from the first plate which is coupled to an adjoining segment by a bend.
12. The electrostatic MEMS device of claim 11 , wherein the first plate and spring beams are symmetric about at least one of a longitudinal and latitudinal axis of the first plate.
13. The electrostatic MEMS device of claim 11 , wherein the at least one spring beam disposed on one side of the first plate is anti-symmetric with respect to the at least one other spring beam disposed on the opposite side of the first plate.
14. The electrostatic MEMS device of claim 10 , wherein the seal is a metal alloy seal, further including a rigid standoff embedded within the metal alloy seal.
15. The electrostatic MEMS device of claim 10 , further comprising:
electrical vias formed through a thickness of the second substrate; and
an electrostatic second plate formed on the second substrate.
16. The electrostatic MEMS device of claim 10 , further comprising:
a plurality of holes formed through a thickness of the first plate, wherein the plurality of holes is disposed in at least one of the following ways: substantially along a latitudinal axis of the first plate, and in a close-packed hexagonal array.
17. The electrostatic MEMS device of claim 14 , wherein the metal seal comprises:
an alloy of gold and indium which bonds the silicon-on-insulator substrate to the second substrate with a substantially hermetic seal around the MEMS device; and
wherein the rigid standoff within the metal seal determines the separation between the silicon-on-insulator substrate and the second substrate.
18. The electrostatic MEMS device of claim 10 , wherein the first plate has at least one shunt bar, located substantially on a nodal line of a vibrational mode of the first plate.
19. The electrostatic MEMS device of claim 18 , wherein the first plate has two shunt bars located each located substantially along one of two nodal lines of a vibrational mode of the first plate.
20. The electrostatic MEMS device of claim 15 , wherein at least one via is electrically coupled to the plate by the seal, which is a metal alloy hermetic seal.
21. A method of operating the electrostatic MEMS device of claim 20 , comprising:
applying a first voltage to the first plate formed on the silicon-on-insulator substrate;
applying a second voltage to the electrostatic second plate formed on the second substrate;
forming an electrical connection between the two electrical contacts by bending the first plate and shunt bars toward the electrical contacts in response to the applied voltages.
22. The method of claim 21 , further comprising:
applying an input signal to one of the two contacts formed on the second substrate; and
obtaining an output signal from the other of the two electrical contact formed on the second substrate.
23. An apparatus for manufacturing an electrostatic MEMS device, comprising:
a silicon-on-insulator substrate including a silicon device layer, and insulating layer and a silicon handle layer
means for forming a first plate in the device layer of the silicon-on-insulator substrate and suspended adjacent to a the handle layer of the silicon-on-insulator substrate, wherein the first suspended plate is coupled to the silicon-on-insulator substrate by a plurality of spring beams;
means for forming at least one electrical contact on a second substrate, wherein the first plate is configured to move toward the at least one electrical contact; and
means for coupling the device layer of the silicon-on-insulator substrate to the second substrate with a seal that seals the MEMS device.