Polishing device
View Patent ↗A polishing device includes a polishing pad for polishing a wafer and a polishing head for holding the wafer. The polishing head has a retainer ring for retaining the wafer in the in-plane direction of the wafer, a membrane sheet for pressing the wafer against the polishing pad, and a head body for supporting the retainer ring and the membrane sheet. The retainer ring has a subordinate retainer member having a ring portion and a plurality of fins extending from the ring portion to retain the peripheral surface of the wafer. The subordinate retainer member has a thickness equal to the thickness of the wafer. The membrane sheet has a diameter larger than the wafer, and presses the wafer and the vicinity of the inner edge of the subordinate retainer member.
1. A polishing device comprising:
a polishing pad for polishing a wafer; and
a polishing head for holding the wafer, said polishing head including a retainer ring for retaining the wafer in an in-plane direction of the wafer, a membrane sheet for pressing the wafer against said polishing pad, and a head body for supporting said retainer ring and said membrane sheet, wherein:
said retainer ring includes a first retainer member having an inner edge for retaining a peripheral surface of the wafer and having a thickness substantially equal to a thickness of the wafer, and a second retainer member for supporting a peripheral portion of said first retainer member; and
said membrane sheet has a diameter larger than a diameter of the wafer and presses said inner edge of said first retainer member in addition to the wafer.
2. The polishing device according to claim 1 , wherein said second retainer member is sandwiched between said head body and said membrane sheet.
3. The polishing device according to claim 1 , wherein said first retainer member includes ring portion supported by said second retainer member and a plurality of fins extending from said ring portion in a radially inward direction to configure said inner edge.
4. The polishing device according to claim 3 , wherein said first retainer member includes therein a plurality of notches.
5. The polishing device according to claim 1 , wherein said first retainer member includes therein a plurality of notches.
6. The polishing device according to claim 1 , wherein said membrane sheet and said head body define a closed space communicated with an air supply member.
7. The polishing device according to claim 6 , further comprising a pressing member disposed in said closed space for pressing said membrane sheet toward the wafer.
8. The polishing device according to claim 7 , wherein said pressing member is configured as a torus member having an internal space communicated with the air supply member.
9. The polishing device according to claim 8 , wherein said internal space of said torus member has a controlled pressure.