Fluorescent x-ray analysis apparatus
View Patent ↗To provide a fluorescent X-ray analysis apparatus, whereby a peak-back ratio is improved by effectively exciting a focused element and a detection limit of the focused element is improved by decreasing a scattered X-ray to be a background. A sample housing has one or more wall surfaces made of a material through which an X-ray transmits and an X-ray source is arranged so that a primary X-ray is irradiated on the wall surface. In addition, the sample housing is arranged so that a wall surface different from a wall surface on which the primary X-ray is irradiated is opposed to an X-ray detector incident window. Further, the primary X-ray from the X-ray source is arranged so as to be able to irradiate the wall surface of the sample housing to which the X-ray detector incident window is opposed. The sample housing has a shape extending in response to extension of a viewing filed that a detection element in the X-ray detector is seen from the X-ray detector incident window. In addition, on the wall of the sample housing, a metal for secondarily exciting the focused element is arranged on an area other than an area through which the primary X-ray transmits and an area where the fluorescent X-ray from the focused element passes to the detector.
1. A fluorescent X-ray analysis apparatus comprising:
a sample container configured to store a quantity of sample and comprising an end wall made at least in part X-ray transmissive and a side wall tapered such that it becomes narrower towards the end wall;
at least one X-ray source located in close proximity to the side wall to interrogate the quantity of sample with an X-ray through the side wall; and
at least one X-ray detector configured to detect, through the end wall of the sample container, a fluorescent X-ray excited out from the quantity of sample, wherein the at least one X-ray detector comprises a periphery configured and placed so as to generally coincide with a perimeter defined by an imaginary extension of the tapered side wall from the end wall.
2. A fluorescent X-ray analysis apparatus according to claim 1 , wherein the at least one X-ray detector is located below a focal point of the imaginary extension.
3. A fluorescent X-ray analysis apparatus according to claim 1 , wherein the side wall is made at least in part X-ray transmissive.
4. A fluorescent X-ray analysis apparatus according to claim 1 , wherein the side wall has a circular cross section.
5. A fluorescent X-ray analysis apparatus according to claim 1 , wherein the side wall has a polygonal cross section.
6. A fluorescent X-ray analysis apparatus according to claim 1 , wherein the at least one X-ray source is arranged such that it irradiates the end wall of the sample container with the X-ray.
7. A fluorescent X-ray analysis apparatus according to claim 1 , wherein the side wall comprises at least one primary filter configured to pass through the X-ray within a different wavelength range.
8. A fluorescent X-ray analysis apparatus according to claim 7 , wherein the at least one X-ray source is movable relative to the sample container such that the at least one X-ray source irradiates the quantity of sample selectively through the at least one primary filter.
9. A fluorescent X-ray analysis apparatus according to claim 1 , wherein the end wall comprises at least one secondary filter configured to pass though the X-ray within a different wavelength range.
10. A fluorescent X-ray analysis apparatus according to claim 9 , wherein the end wall is movable relative to the at least one secondary filter such that the at least one X-ray detector receives the florescent X-ray selectively through the at least one secondary filter.
11. A fluorescent X-ray analysis apparatus according to claim 1 , wherein the side wall is made at least in part of at least one material which, excited by the X-ray, generates a different secondary X-ray sufficient to excite the fluorescent X-ray out from the quantity of sample.