Scanning type probe microscope
View Patent ↗To be able to measure a value with regard to a dissipation, or a value in proportion to a dissipation energy without making a premise by being brought into a steady state. Exciting means 12 for carrying out an excitation by following a resonance frequency of a cantilever 2 , a displacement detector 10 for detecting a displacement of a stylus at a tip of the cantilever 2 , an amplitude detector 20 for successively providing an amplitude from a signal from the displacement detector 10 , a difference value detector 21 for providing a time difference value of the amplitude, a divider 22 for providing a value of a quotient between the time difference values, a logarithmic converter 23 for providing a logarithmic value of the value of the quotient, and a second divider 24 for providing a value with regard to a dissipation by calculating a value constituted by dividing the logarithmic value by a difference time period are provided.
1. A scanning type probe microscope characterized in a scanning type probe microscope comprising:
exciting means for carrying out a constant excitation by following a resonance frequency of a cantilever; and
displacement detecting means for detecting a displacement of a stylus at a tip of the cantilever, the scanning type probe microscope further comprising:
means for successively providing an amplitude from a signal from the displacement detecting means;
means for providing an average amplitude by averaging the amplitudes at a plurality of periods;
means for providing a time difference value of the average amplitude;
means for providing a value of a quotient between the time difference values;
means for providing a logarithmic value of the value of the quotient; and
second divider means for providing a value with regard to a dissipation by calculating a value constituted by dividing the logarithmic value by a difference time period.
2. The scanning type probe microscope according to claim 1 , further comprising:
converter means for converting the value with regard to the dissipation calculated by the second divider means into an electric signal; and
frequency detector means for detecting a resonance frequency of the cantilever from a displacement signal from the displacement detecting means, further comprising:
third divider means for calculating the dissipation value from a ratio of a signal in correspondence with the value with regard to the dissipation provided by the converter means to a value of the resonance frequency provided from the frequency detector means.
3. The scanning type probe microscope according to claim 1 , further comprising:
scanning means for scanning the stylus relative to a surface of the sample in X, Y directions in parallel with the surface of the sample and a Z direction orthogonal to the surface of the sample;
measuring means for acquiring a measured data at a time point at which the stylus is made to be proximate to or brought into contact with the surface of the sample; and
controlling means for controlling scanning in the X, Y directions and scanning in the Z direction;
wherein the controlling means stops scanning in the X, Y directions when the stylus reaches a measuring position by the scanning in the X, Y directions and scans the stylus in the Z direction of being proximate to the surface of the sample; and
wherein the measuring means acquires the measured data at the time point at which the stylus is proximate to or brought into contact with the surface of the sample by scanning in the Z direction.
4. The scanning type probe microscope according to claim 1 , further comprising means for controlling a distance between the stylus and the sample by using the value with regard to the dissipation.
5. The scanning type probe microscope according to claim 1 , further comprising means for controlling a distance between the stylus and the sample by using the dissipation value.
6. The scanning type probe microscope according to claim 1 , further comprising image apparatus for imaging the value with regard to the dissipation or the dissipation value.