IP Library Granted Patent US 7,646,049
Granted Patent B2
US 7,646,049 · App. 11/844,714 · Granted Jan 12, 2010

Image sensor and fabricating method thereof

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Quick Facts
Patent No.
US 7,646,049
App. No.
11/844,714
Granted
Jan 12, 2010
Kind
B2
Abstract

An image sensor includes a photo diode formed over a semiconductor substrate. At least one IMD layer is formed on the semiconductor substrate. A dielectric medium fills a through-hole formed in the IMD layer over the photo diode. The dielectric medium may be made with materials with a higher refractive index than the materials forming the IMD layer.

Claims (33)

1. An apparatus comprising:

a photo diode formed in a semiconductor substrate;

at least one intermetal dielectric layer formed over the semiconductor substrate, the at least one intermetal dielectric layer having a plurality of through holes formed over and corresponding to the photo diode; and

a dielectric medium filling each one of the plurality of a through-holes in said at least one intermetal dielectric layer.

2. The apparatus of claim 1 , wherein said dielectric medium has a refractive index higher than the refractive index of said at least one intermetal dielectric layer.

3. The apparatus of claim 1 , comprising a micro lens formed over said at least one intermetal dielectric layer, wherein a focal length of the micro lens is different than a height of the dielectric medium.

4. The apparatus of claim 1 , comprising a micro lens formed over said at least one intermetal dielectric layer, wherein a focal length of the micro lens is substantially the same as a height of the dielectric medium.

5. The apparatus of claim 3 , wherein a color filter is formed between the micro lens and the dielectric medium.

6. The apparatus of claim 1 , wherein the dielectric medium comprises a plurality of layers.

7. An apparatus comprising:

a photo diode formed in a semiconductor substrate;

at least one intermetal dielectric layer formed over the semiconductor substrate, the at least one intermetal dielectric layer having a plurality of through holes formed over and corresponding to the photo diode;

a dielectric medium filling each one of the plurality of through-holes in said at least one intermetal dielectric layer to contact the photo diode, wherein a width of the dielectric medium is greater in an upper portion of the dielectric medium than in a lower portion of the dielectric medium;

a color filter formed over and contacting the at least one intermetal dielectric layer and the dielectric medium; and

a micro lens formed over and contacting the color filter.

8. The apparatus of claim 7 , wherein said dielectric medium has a refractive index higher than the refractive index of said at least one intermetal dielectric layer.

9. The apparatus of claim 7 , wherein a focal length of the micro lens is different than a height of the dielectric medium.

10. The apparatus of claim 7 , wherein a focal length of the micro lens is substantially the same as a height of the dielectric medium.

11. The apparatus of claim 7 , wherein the dielectric medium comprises a plurality of layers.

12. A method comprising:

forming at least one photo diode in a semiconductor substrate;

forming at least one intermetal dielectric layer over said semiconductor substrate;

forming a plurality of through-holes in said at least one intermetal dielectric layer over and corresponding to each one of the at least one photo diode

filling the plurality of through-holes with a dielectric medium.

13. The method of claim 12 , wherein the dielectric medium has a higher refractive index than said at least one intermetal dielectric layer.

14. The method of claim 12 , wherein said filling the plurality of through-holes with the dielectric medium comprises deposition of the dielectric medium.

15. The method of claim 12 , wherein said filling the plurality of through-holes with the dielectric medium comprises coating the dielectric medium.

16. The method of claim 12 , wherein a width of each of the plurality of through-holes is greater in an upper portion of the through-hole than in a lower portion of the through-hole.

17. The method of claim 12 , comprising:

forming a color filter over said at least one intermetal dielectric layer; and

forming a micro lens over the color filter.

18. The method of claim 17 , wherein the focal length of the micro lens is different than a length of each of the plurality of through-holes.

19. The method of claim 17 , wherein the focal length of the micro lens is the same as a length of each of the plurality of through-holes.

Assignments (7)
CHANGE OF NAME Recorded Nov 3, 2021
From: CONVERSANT INTELLECTUAL PROPERTY INC.
To: MOSAID TECHNOLOGIES INCORPORATED
Reel/Frame 058793/0785 →
RELEASE OF SECURITY INTEREST Recorded Nov 11, 2020
From: CPPIB CREDIT INVESTMENTS INC.
To: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
Reel/Frame 054385/0435 →
AMENDED AND RESTATED U.S. PATENT SECURITY AGREEMENT (FOR NON-U.S. GRANTORS) Recorded Aug 22, 2018
From: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
To: CPPIB CREDIT INVESTMENTS, INC.
Reel/Frame 046900/0136 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2017
From: DONGBU HITEK CO. LTD.; DONGBU ELECTRONICS CO., LTD.
To: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
Reel/Frame 041330/0143 →
CORRECTION BY DECLARATION OF INCORRECT SERIAL NO. RECORDED AT REEL/FRAME 020132/0574. Recorded May 31, 2013
From: DONGBU HITEK CO., LTD.
To: DONGBU HITEK CO., LTD.
Reel/Frame 030584/0779 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 19, 2007
From: LEE, CHIH-HUNG; PERNER, RICHARD J; BROWN, BRIAN S; DARBYSHIRE, JOHN F
To: ABBOTT LABORATORIES
Reel/Frame 020132/0574 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 24, 2007
From: SHIM, CHEON-MAN
To: DONGBU HITEK CO., LTD.
Reel/Frame 019745/0588 →