Copper alloy bonding wire for semiconductor device
View Patent ↗The present invention provides a semiconductor-device copper-alloy bonding wire which has an inexpensive material cost, ensures a superior ball joining shape, wire joining characteristic, and the like, and a good loop formation characteristic, and a superior mass productivity. The semiconductor-device copper-alloy bonding wire contains at least one of Mg and P in total of 10 to 700 mass ppm, and oxygen within a range from 6 to 30 mass ppm.
1. A semiconductor-device copper-alloy bonding wire comprising:
P in total of 10 to 700 mass ppm; and
oxygen within a range from 6 to 30 mass ppm.
2. The semiconductor-device copper-alloy bonding wire of claim 1 further comprising:
at least any one of Ag, Pd, Pt, and Au in total of 10 to 5000 mass ppm.
3. The semiconductor-device copper-alloy bonding wire of claim 1 further comprising:
at least any one of Be, Al, Bi, Si, In, Ge, Ti, and V in total of 6 to 300 mass ppm.
4. The semiconductor-device copper-alloy bonding wire of claim 1 further comprising:
at least any one of Ca, Y, La, Ce, Pr, and Nd in total of 5 to 300 mass ppm.
5. The semiconductor-device copper-alloy bonding wire of claim 1 further comprising:
at least any one of Ag, Pd, Pt, and Au in total of 10 to 5000 mass ppm; and
at least any one of Be, Al, Bi, Si, In, Ge, Ti and V in total of 6 to 300 mass ppm.
6. The semiconductor-device copper-alloy bonding wire of claim 1 further comprising:
at least any one of Ag, Pd, Pt, and Au in total of 10 to 5000 mass ppm; and
at least any one of Ca, Y, La, Ce, Pr and Nd in total of 5 to 300 mass ppm.
7. The semiconductor-device copper-alloy bonding wire of claim 1 , further comprising:
at least any one of Ag, Pd, Pt and Au in total of 10 to 5000 mass ppm;
at least any one of Be, Al, Bi, Si, In, Ge, Ti and V in total of 6 to 300 mass ppm; and
at least any one of Ca, Y, La, Ce, Pr, and Nd in total of 5 to 300 mass ppm.
8. The semiconductor-device copper-alloy bonding wire according to claim 1 , wherein a concentration of P is 45 to 700 mass ppm.
9. The semiconductor-device copper-alloy bonding wire according to claim 1 , wherein regarding said oxygen concentration, a total concentration of oxygen contained inside and oxygen contained in an oxide on a surface is within a range from 6 to 30 mass ppm.
10. The semiconductor-device copper-alloy bonding wire according to claim 1 , wherein regarding said oxygen concentration, a total oxygen concentration detected by a combustion method is within a range from 6 to 30 mass ppm, and
a wire diameter is within a range from 10 to 300 μm.
11. The semiconductor-device copper-alloy bonding wire according to claim 2 , wherein a concentration of P is 45 to 700 mass ppm.
12. The semiconductor-device copper-alloy bonding wire according to claim 2 , wherein regarding said oxygen concentration, a total concentration of oxygen contained inside and oxygen contained in an oxide on a surface is within a range from 6 to 30 mass ppm.
13. The semiconductor-device copper-alloy bonding wire according to claim 2 , wherein regarding said oxygen concentration, a total oxygen concentration detected by a combustion method is within a range from 6 to 30 mass ppm, and
a wire diameter is within a range from 10 to 300 μm.