Method of manufacturing semiconductor device
View Patent ↗A method of manufacturing a semiconductor device forms an N − diffusion layer to be a source/drain region of a grooved transistor simultaneously with an N − diffusion layer of a channel region directly under a gate electrode of an antifuse element. The formation of the N − diffusion layer directly under the gate electrode of the antifuse element stabilizes electrical connection between the gate electrode and the source/drain diffusion region even during writing with a low write voltage.
1. A method of manufacturing a semiconductor device having an antifuse element and a grooved transistor, comprising the steps of:
forming a groove for the grooved transistor;
forming a gate insulating film;
forming a gate electrode film; and
simultaneously forming a diffusion layer in a source/drain diffusion region of the grooved transistor and in a channel region for the antifuse element.
2. The method according to claim 1 , wherein the diffusion layer is formed by implanting ions from above the gate electrode film.
3. The method according to claim 2 , wherein the diffusion layer formation step introduces an impurity into a shallow region from a surface of a semiconductor substrate by phosphorus ion implantation using phosphorus as a source.
4. The method according to claim 3 , wherein the diffusion layer formation step dopes a channel region of the grooved transistor by boron ion implantation prior to conducting the phosphorus ion implantation.
5. The method according to claim 4 , wherein a depth of the phosphorus ion implantation is smaller than a depth of the boron ion implantation.
6. The method according to claim 5 , wherein boron is introduced underneath the channel region of the antifuse element by the boron ion implantation.
7. The method according to claim 5 , wherein boron is introduced into an underside region of the source/drain diffusion region of the grooved transistor by the boron ion implantation.
8. The method according to claim 5 , wherein the boron ion implantation and the phosphorus ion implantation are performed by the use of a same resist pattern to implant the boron ions and the phosphorus ions, respectively.
9. A method of manufacturing a semiconductor device having an antifuse element region and a grooved transistor region on a semiconductor substrate, comprising:
forming a groove by removing a part of the semiconductor substrate in the antifuse element region;
forming a gate insulating film on a surface of the semiconductor substrate in the antifuse element region and the grooved transistor region;
forming a gate electrode film on the gate insulating film in the antifuse element region and the grooved transistor region;
implanting impurity atoms into the semiconductor substrate by penetrating the gate electrode film, and simultaneously forming a diffusion layer in a source/drain region of the grooved transistor and in a channel region of the antifuse element, wherein the source/drain region is formed outside of the groove in the grooved transistor region; and
forming a first gate electrode in the antifuse element region and a second gate electrode in the grooved transistor region by patterning the gate electrode film, wherein the channel region is formed under the first gate electrode in the antifuse element region.
10. The method according to claim 9 , wherein a conduction type of the semiconductor substrate is P-type, the gate electrode film Comprises an N-type poly silicon film, and N-type impurity atoms are implanted into the semiconductor substrate by penetrating the gate electrode film.
11. The method according to claim 10 , further comprising implanting boron atoms into the semiconductor substrate by penetrating the gate electrode film on the gate insulating film.
12. The method according to claim 11 , wherein the N-type impurity atom is phosphorus, a dose of the phosphorus implantation being larger than a dose of the boron implantation.
13. The method according to claim 11 , wherein the boron atoms are implanted under the channel region of the antifuse element.
14. The method of according to claim 11 , wherein the boron atoms are implanted under the source/drain region of the grooved transistor.