Semiconductor device and manufacturing method thereof
View Patent ↗A through electrode is formed prior to fabricating a semiconductor device by using a standard manufacturing method. Aside face of the through electrode is insulated from a semiconductor substrate by an insulating film, while the top face thereof is covered with a protective insulating film. These insulating films covering the through electrode protect a conductor of the through electrode and prevent emission of a contaminant from the conductor. Standard manufacturing conditions can be applied without change.
1. A method of manufacturing a semiconductor device having a through electrode, comprising:
forming a trench for the through electrode in a semiconductor substrate;
forming stacked insulating films on a top face of the semiconductor substrate and a side face of the trench;
filling the trench with a conductor after forming the stacked insulating films;
etching the conductor to form a recess so that a top face of the conductor is at a lower level than a top face of the stacked insulating films;
removing a part of the stacked insulating films on the top face of the semiconductor substrate to expose an isolation region of the semiconductor substrate;
removing a top portion of the conductor and the semiconductor substrate of the isolation region simultaneously; and
forming a protective insulating film on the conductor which is remained in the trench after removing the top portion of the conductor.
2. The method according to claim 1 , wherein forming the stacked insulating films comprises:
forming a first oxide film on the semiconductor substrate;
forming a nitride film on the first oxide film; and,
forming a second oxide film on the nitride film.
3. The method according to claim 2 , further comprising:
removing the second oxide film over the top face of the semiconductor substrate after etching the conductor to form the recess,
wherein the nitride film and the first oxide film are used as a mask to remove the top portion of the conductor and the semiconductor substrate of the isolation region.
4. The method according to claim 1 , wherein:
an isolation trench is formed at the isolation region by removing the semiconductor substrate.
5. The method according to claim 4 , wherein:
a remaining top face of the conductor after removing the top portion of the conductor is at the same level as a bottom face of the isolation trench.
6. The method according to claim 4 , wherein:
the isolation trench is filled with the protective insulating film at the same time when the protective insulating film is formed on the conductor.
7. The method according to claim 6 , further comprising:
after forming the protective insulating film, a top face of the protective insulating film is flattened by CMP process,
wherein the protective insulating film is remained in the trench and the isolation trench.
8. The method according to claim 1 , wherein:
the conductor is polysilicon containing an impurity.
9. The method according to claim 1 , further comprising:
exposing the top face of the semiconductor substrate at an active region of the semiconductor device after forming the protective insulating film;
forming a gate insulating film on the active region;
forming a gate electrode facing the top face of the semiconductor substrate with an intervention of the gate insulating film therebetween;
forming a diffusion layer in the active region which is not covered by the gate electrode; and
forming an interlayer insulating film over the semiconductor substrate.
10. The method according to claim 9 , further comprising: the semiconductor substrate is ground from a rear face of the semiconductor substrate after forming the interlayer insulating film.