Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor
The present invention includes a method of solidifying a polymerizable liquid to form a film on a substrate that features minimizing inhibition of the polymerization process by oxygen contained in the atmosphere surrounding the polymerizable liquid. To that end, the polymerizable liquid includes, inter alia, an initiator that consumes oxygen that interacts with the polymerizable liquid and generates additional free radicals to facilitate the polymerizable process.
1. An imprint lithography mold assembly, comprising:
(a) a mold having a surface;
(b) a substrate having a surface; and
(c) a polymerizable composition disposed between the surface of the mold and the surface of the substrate, wherein at least a portion of the polymerizable composition is in contact with an oxygen-containing atmosphere between the surface of the mold and the surface of the substrate, and
wherein the polymerizable composition comprises:
(i) a plurality of molecules;
(ii) a photoinitiator; and
(iii) an oxygen scavenger,
wherein the photoinitiator is operable to react with oxygen in the oxygen-containing atmosphere during polymerization of the polymerizable compound to form photoinitiator-peroxide radicals,
wherein the oxygen scavenger is operable to react with the photoinitiator-peroxide radicals formed during polymerization of the polymerizable composition to form an oxygen scavenger radical, and
wherein the oxygen scavenger radical is operable to facilitate further polymerization and to reduce the formation of photoinitiator-peroxide radicals by reacting with oxygen in the oxygen-containing atmosphere to form additional oxygen scavenger radicals.
2. The imprint lithography mold assembly of claim 1 , wherein the oxygen scavenger is selected from a group consisting of 2-methyl-1[4-(methylthio)phenyl]-2-morpholinopropan-1-one-, N-methyldiethanolamine, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl) -1-butanone, and 2-(4-methyl-benzyl)-2-dimethylamino-1-(4-morpholinophenyl)-1-butanone.
3. The imprint lithography mold assembly of claim 1 , wherein the plurality of molecules includes isobornyl acrylate, n-hexyl acrylate, and ethylene glycol diacrylate.
4. The imprint lithography mold assembly of claim 1 , wherein the polymerizable composition further comprises a surfactant.
5. The imprint lithography mold assembly of claim 4 , wherein the surfactant comprises R 1 R 2 , wherein R 1 =F(CF 2 CF 2 ) y , with y being in a range of 1 to 7, inclusive, and R 2 =CF 2 CF 2 O(CF 2 CF 2 O) x H, with X in a range of 0 to 15, inclusive.
6. The imprint lithography mold assembly of claim 4 , wherein the plurality of molecules includes isobornyl acrylate, n-hexyl acrylate, and ethylene glycol diacrylate.
7. The imprint lithography mold assembly of claim 1 , wherein the photoinitiator comprises 2-hydroxy-2-methyl-1-phenyl-propan-1-one.
8. The imprint lithography mold assembly of claim 1 , wherein the photoinitiator comprises an amine group.
9. The imprint lithography mold assembly of claim 8 , wherein the amine group is photo-active.
10. An imprint lithography mold system, comprising:
(a) a mold having a surface;
(b) a substrate having a surface; and
(c) a polymerizable composition disposed between the surface of the mold and the surface of the substrate, wherein at least a portion of the polymerizable composition is in contact with an oxygen-containing atmosphere between the surface of the mold and the surface of the substrate, and wherein the polymerizable composition comprises:
(i) a plurality of molecules;
(ii) a photoinitiator including 2-hydroxy-2-methyl-1-phenyl-propan-1-one; and
(iii) an oxygen scavenger, wherein the photoinitiator is operable to react with oxygen in the oxygen-containing atmosphere during polymerization of the polymerizable compound to form photoinitiator-peroxide radicals,
wherein the oxygen scavenger is operable to react with the photoinitiator-peroxide radicals formed during polymerization of the polymerizable composition to form an oxygen scavenger radical, and
wherein the oxygen scavenger radical is operable to facilitate further polymerization and to reduce the formation of photoinitiator-peroxide radicals by reacting with oxygen in the oxygen-containing atmosphere to form additional oxygen scavenger radicals.
11. The imprint lithography mold assembly of claim 10 , wherein the oxygen scavenger is selected from a group consisting of 2-methyl-1[4-(methylthio)phenyl]-2-morpholinopropan-1-one, N-methyldiethanolamine, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)-1-butanone, and 2-(4-methyl-benzyl)-2-dimethylamino-1-(4-morpholinophenyl)-1-butanone.
12. The imprint lithography mold assembly of claim 10 , wherein the plurality of molecules includes isobornyl acrylate, n-hexyl acrylate, and ethylene glycol diacrylate.
13. The imprint lithography mold assembly of claim 10 , wherein the polymerizable composition further comprises a surfactant.
14. The imprint lithography mold assembly of claim 13 , wherein the surfactant comprises R 1 R 2 , wherein R 1 =F(CF 2 CF 2 ) y , with y being in a range of 1 to 7, inclusive, and R 2 =CF 2 CF 2 O(CF 2 CF 2 O) x H, with X in a range of 0 to 15, inclusive.
15. The imprint lithography mold assembly of claim 10 , wherein the photoinitiator further includes an amine.
16. The imprint lithography mold assembly of claim 15 , wherein the amine is photo-active.
17. An imprint lithography mold system, comprising:
(a) a mold having a surface;
(b) a substrate having a surface; and
(c) a polymerizable composition disposed between the surface of the mold and the surface of the substrate, wherein at least a portion of the polymerizable composition is in contact with an oxygen-containing atmosphere between the surface of the mold and the surface of the substrate, and wherein the polymerizable composition comprises:
(i) a plurality of molecules;
(ii) a photoinitiator including an amine group;
(iii) a surfactant; and
(iv) an oxygen scavenger,
wherein the photoinitiator is operable to react with oxygen in the oxygen-containing atmosphere during polymerization of the polymerizable compound to form photoinitiator-peroxide radicals,
wherein the oxygen scavenger is operable to react with the photoinitiator-peroxide radicals formed during polymerization of the polymerizable composition to form an oxygen scavenger radical, and
wherein the oxygen scavenger radical is operable to facilitate further polymerization and to reduce the formation of photoinitiator-peroxide radicals by reacting with oxygen in the oxygen-containing atmosphere to form additional oxygen scavenger radicals.
18. The imprint lithography mold assembly of claim 17 , wherein the oxygen scavenger is selected from a group consisting of 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinopropan-1-one, N-methyldiethanolamine, 2-benzyl-2-dimethylamino-1(4-morpholinophenyl)-1-butanone, and 2-(4-methyl-benzyl)-2-dimethylamino-1(4-morpholinophenyl)-1-butanone.
19. The imprint lithography mold assembly of claim 17 , wherein the plurality of molecules includes isobornyl acrylate, n-hexyl acrylate, and ethylene glycol diacrylate.
20. The imprint lithography mold assembly of claim 17 , wherein the surfactant comprises R 1 R 2 , wherein R 1 =F(CF 2 CF 2 ) y , with y being in a range of 1 to 7, inclusive, and R 2 =CF 2 CF 2 O(CF 2 CF 2 O) x H, with X in a range of 0 to 15, inclusive.