Insulated-gate semiconductor device and PN junction diodes
View Patent ↗Channel regions continuous with transistor cells are disposed also below a gate pad electrode. The channel region below the gate pad electrode is fixed to a source potential. Thus, a predetermined reverse breakdown voltage between a drain and a source is secured without forming a p+ type impurity region below the entire lower surface of the gate pad electrode. Furthermore, a protection diode is formed in a conductive layer disposed at the outer periphery of an operation region.
1. An insulated-gate semiconductor device comprising:
a semiconductor substrate of a first general conductivity type;
a plurality of gate electrodes formed on or in a surface portion of the semiconductor substrate in a form of stripes running in a first direction;
a plurality of channel regions of a second general conductivity type formed in the surface portion in a form of stripes running in the first direction;
a first insulating film formed between one of the plurality of gate electrodes and a corresponding one of the plurality of channel regions;
a plurality of source regions of the first general conductivity type formed in the plurality of channel regions in a form of stripes running in the first direction;
a gate pad electrode formed on the surface portion so that portions of the plurality of channel regions of the stripe form are disposed under the gate pad electrode;
a plurality of pn junction diode elements formed on the surface portion outside the gate pad electrode so as to extend in the first direction, each of the plurality of pn junction diode elements comprising a plurality of pn junctions serially connected;
a second insulating film formed on each of the plurality of gate electrodes, on the plurality of pn junction diode elements and on the portions of the plurality of channel regions; and
a source electrode formed on the surface portion so that the source electrode is disposed on the plurality of source regions and is electrically in contact with the plurality of source regions through contact holes formed in the second insulating film, and no part of the source electrode is disposed under the gate pad electrode.
2. The insulated-gate semiconductor device of claim 1 , further comprising a gate leading electrode formed on a peripheral portion of the semiconductor substrate and electrically connecting the gate pad electrode and the plurality of gate electrodes, and a high concentration region of the second general conductivity type formed in the surface portion under the gate leading electrode so as to be electrically connected to the plurality of channel regions.
3. The insulated-gate semiconductor device according to claim 1 , wherein the portions of the plurality of channel regions under the gate pad electrode are electrically connected to the source electrode.
4. The insulated-gate semiconductor device of claim 1 , wherein a width of the plurality of pn junction diode elements is larger than a width of the plurality of gate electrodes.
5. The insulated-gate semiconductor device of claim 1 , wherein each of the plurality of pn junction diode elements is configured to receive at one end thereof a potential that is applied to the plurality of gate electrodes and to receive at another end thereof a potential that is applied to the plurality of source regions.
6. The insulated-gate semiconductor device of claim 1 , wherein the plurality of pn junction diode elements is connected to each other in parallel to form a protection device connected between the plurality of gate electrodes and the source electrode.
7. The insulated-gate semiconductor device of claim 1 , further comprising a gate leading electrode formed on a peripheral portion of the substrate, connecting the plurality of gate electrodes and physically in contact with the plurality of pn junction diodes.
8. The insulated-gate semiconductor device of claim 1 , further comprising a gate wiring that is disposed on the semiconductor substrate to surround the plurality of gate electrodes, the plurality of channel regions and the plurality of source regions, is electrically connected to the gate electrodes and is physically connected to the plurality of gate pad electrode with a metal wiring, wherein the plurality of pn junction diode elements is disposed between the gate pad electrode and a portion of the gate wiring that is connected to the gate pad electrode with the metal wiring.
9. The insulated-gate semiconductor device of claim 1 , wherein pn junction interfaces of the plurality of pn junction diode elements are perpendicular to the first direction.