Method of forming a device isolation film of a semiconductor device
View Patent ↗A method of forming a device isolation film for a semiconductor device comprising forming a trench on a silicon semiconductor substrate, rounding an upper corner of the trench using an in-situ plasma method, filling the trench by forming an insulating layer over the silicon semiconductor substrate, and forming a shallow trench isolation area by performing a planarization process on the insulating layer so as to expose the silicon semiconductor substrate.
1. A method of forming a device isolation film for a semiconductor device, the method comprising:
forming a silicon oxide film on a silicon semiconductor substrate;
forming a photoresist pattern on the surface of the silicon oxide film;
forming a trench in the semiconductor substrate by selectively etching the silicon oxide film and the silicon semiconductor substrate using the photoresist pattern as a mask in an etching process;
rounding an upper corner of the silicon oxide film without rounding an upper corner of the silicon semiconductor substrate by using an in-situ plasma process;
filling the trench by depositing an insulating layer over the silicon semiconductor substrate; and
forming a shallow trench isolation area by performing a planarization process on the insulating layer so as to expose the silicon semiconductor substrate and remove the silicon oxide film having the rounded upper corner.
2. The method according to claim 1 , wherein the in-situ plasma method uses a gas capable of supplying a top power of between 2000 W and 5000 W, a side power of between 2000 W and 5000 W, and a bias power of between 500 W and 5000 W.
3. The method according to claim 2 , wherein the gas comprises a gas selected from the group of O2, He, Ar, H, NF3 and B2H6, with a flow rate of between 10 sccm and 1000 sccm.