Semiconductor device including a germanium silicide film on a selective epitaxial layer
View Patent ↗A process for manufacturing a semiconductor device includes: forming first contact holes in a dielectric film for a PMOS transistor; depositing germanium on the source/drain regions of the PMOS transistor exposed from the first contact holes; heat treating the germanium with silicon in the source/drain regions of the PMOS transistor to form a germanium silicide film; forming second contact holes in the dielectric film for the source/drain regions of the NMOS transistor; and forming contact plugs in the first and second contact holes.
1. A semiconductor device comprising:
a silicon substrate;
a PMOS transistor formed on said silicon substrate and including a source/drain region and a contact layer formed on said source/drain region;
a dielectric film formed on said PMOS transistor and including therein a first contact hole penetrating said dielectric film, said contact layer, and a surface of said source/drain region of said PMOS transistor, the first contact hole having a bottom within the source/drain region;
a germanium silicide film formed in said first contact hole and having a side formed on said contact layer and a bottom formed at the bottom of the first contact hole and in contact with said source/drain region of said PMOS transistor; and
a first contact plug connecting to said germanium silicide film in said first contact hole.
2. The semiconductor device according to claim 1 , wherein said first contact hole has a bottom located below a gate oxide film of said PMOS transistor.
3. The semiconductor device according to claim 2 , further comprising:
an NMOS transistor formed on said silicon substrate; and
a second contact hole penetrating through said dielectric film to react a source/drain region of said NMOS transistor, said second contact hole having a bottom located above said bottom of said first contact hole.
4. The semiconductor device according to claim 3 , wherein said first contact hole has an elliptical shape in cross section.
5. The semiconductor device according to claim 4 , wherein said second contact hole has a circular shape in cross section.
6. The semiconductor device according to claim 3 , wherein said first contact hole includes a plurality of elliptical holes arranged in a direction of major axis of said elliptical holes.
7. The semiconductor device according to claim 1 , further comprising:
an NMOS transistor formed on said silicon substrate, said contact layer comprising an impurity-doped silicon film deposited by a selective epitaxial deposition process on said source/drain region of said PMOS transistor and a source/drain region of said NMOS transistor; and
a second contact plug formed in a second contact hole penetrating said dielectric film and connecting to said source/drain region of said NMOS transistor,
wherein said first contact hole penetrates said impurity-doped silicon layer to reach said source/drain region of said PMOS transistor.
8. The semiconductor device according to claim 7 , wherein said germanium silicide film is in contact with said impurity-doped silicon film on a sidewall of said first contact hole.
9. A method for manufacturing a semiconductor device comprising:
forming a PMOS transistor and an NMOS transistor each including a source/drain region and a contact layer formed on said source/drain region;
forming a dielectric film covering said PMOS transistor and said NMOS transistor,
forming a first contact hole penetrating said dielectric film, said contact layer, and a surface of said source/drain region of said PMOS transistor, the first contact hole having a bottom within the source/drain region;
depositing germanium on said source/drain region of said PMOS transistor at the bottom of said first contact hole;
heat treating said deposited germanium to react with silicon in said source/drain region of said PMOS transistor and thereby form a germanium silicide film in said first contact hole and having a side formed on said contact layer and a bottom in contact with said source/drain region of said PMOS transistor; and
forming a first contact plug connecting to said germanium silicide film within said first contact hole.
10. The method according to claim 9 , further comprising, prior to said forming said dielectric film:
forming said contact layer by selectively depositing an impurity-doped silicon film on said source/drain region of said PMOS transistor and said NMOS transistor.
11. The method according to claim 10 , further comprising:
after said heat treating, forming a second contact hole penetrating said dielectric film to reach said impurity-doped silicon film formed on said source/drain region of said NMOS transistor.
12. The method according to claim 11 , wherein said forming second contact hole also forms a gate contact hole exposing therethrough a gate electrode of said PMOS transistor and said NMOS transistor.
13. The method according to claim 11 , wherein said first contact hole has an elliptical shape and said second contact hole has a circular shape.
14. The method according to claim 13 , wherein said first contact hole includes a plurality of elliptical holes.
15. The semiconductor device according to claim 3 , wherein a cross-sectional shape of the first contact hole is different than a cross-sectional shape of the second contact hole.
16. The semiconductor device according to claim 3 , wherein the NMOS transistor comprises a contact layer formed on the source/drain region of the NMOS transistor, and
wherein the bottom of the second contact hole is defined by a surface of the contact layer.
17. The semiconductor device according to claim 16 , wherein the contact layer of the PMOS transistor comprises a P + diffused contact region and the contact layer of the NMOS transistor comprises an N + diffused contact region.
18. A semiconductor device comprising:
a transistor formed on a silicon substrate and including a source/drain region and a contact layer formed on the source/drain region;
a dielectric film formed on the transistor, a contact hole being formed in the dielectric film, the contact layer, and a surface of the source/drain region of the transistor, the contact hole having a bottom within the source/drain region;
a germanium silicide film formed in the contact hole and including a side formed on the contact layer and a bottom formed at the bottom of the contact hole and in contact with the source/drain region of the transistor; and
a contact plug formed in the contact hole and connected to the germanium silicide film in the contact hole.
19. A semiconductor device comprising:
a transistor formed on a silicon substrate and including a source/drain region;
a dielectric film formed on the transistor, a contact hole being formed in the dielectric film and having a bottom within the source/drain region;
a germanium silicide film formed on an inner sidewall of the contact hole and including a bottom formed at the bottom of the contact hole and in contact with the source/drain region; and
a contact plug formed in the contact hole and connected to the germanium silicide film in the contact hole.
20. A method of manufacturing a semiconductor device comprising:
forming a transistor including a source/drain region on a silicon substrate;
forming a dielectric film on the transistor;
forming a contact hole in the dielectric film, the contact hole having a bottom within the source/drain region;
forming a germanium silicide film on an inner sidewall of the contact hole, the germanium silicide film having a bottom formed at the bottom of the contact hole and in contact with the source/drain region; and
forming a contact plug in contact with the silicide film within the contact hole.