Method of treating the surface of copper and copper
View Patent ↗A method of treating the surface of copper is provided to ensure adhesive strength between the surface of copper and an insulating layer without forming irregularities exceeding 1 μm on the surface of copper and to improve insulation reliability between wirings. A copper whose surface is treated by the above surface treating method is also provided. The method of treating the surface of copper comprises the surface of copper comprising the steps of: forming a metal nobler than copper discretely on the surface of copper; and subsequently oxidizing the surface of copper by using an alkaline solution containing an oxidant.
1. A method of treating the surface of copper, comprising the steps of:
forming a metal nobler than copper discretely on the surface of copper; and subsequently
oxidizing the surface of copper by using an alkaline solution containing an oxidant.
2. The method of treating the surface of copper according to claim 1 , further comprising:
carrying out one or more treatments selected from the group consisting of reducing treatment, coupling treatment and corrosion inhibitive treatment, after the step of oxidizing the surface of copper.
3. The method of treating the surface of copper according to claim 2 , wherein the oxidant is one or more selected from the group consisting of a chlorate, a chlorite, a hypochlorite, a perchlorate and a peroxodisulfate.
4. The method of treating the surface of copper according to claim 2 , wherein said reducing treatment is carried out to convert irregularities made of copper oxide crystals, formed by said oxidizing, to irregularities of metal copper.
5. The method of treating the surface of copper according to claim 1 , wherein the oxidant is one or more selected from the group consisting of a chlorate, a chlorite, a hypochlorite, a perchlorate and a peroxodisulfate.
6. The method of treating the surface of copper according to claim 1 , wherein the metal nobler than copper is a metal selected from the group consisting of gold, silver, platinum, palladium, rhodium, rhenium, ruthenium, osmium and iridium or an alloy containing said metal.
7. The method of treating the surface of copper according to claim 1 , wherein the roughness Rz of the surface of copper after being treated is 1 nm or more and 1000 nm or less.
8. The method of treating the surface of copper according to claim 1 , wherein said oxidizing forms precise and uniform copper oxide crystals on the surface of copper.
9. The method of treating the surface of copper according to claim 1 , wherein said oxidizing forms irregularities of crystals of copper oxide on the surface of copper, amount of crystals of the copper oxide being 0.001 mg/cm 2 or more and 0.3 mg/cm 2 or less.
10. A copper obtained by a method comprising the steps of:
forming a metal nobler than copper discretely on the surface of copper; and then
oxidizing the surface of copper by using an alkaline solution containing an oxidant.
11. The copper according to claim 10 , wherein the method further comprises, after the step of oxidizing, carrying out one or more treatments selected from the group consisting of reducing treatment, coupling treatment and corrosion inhibitive treatment.
12. The copper according to claim 11 , wherein the oxidant is one or more selected from the group consisting of a chlorate, a chlorite, a hypochlorite, a perchlorate and a peroxodisulfate.
13. The copper according to claim 11 , which has been further subjected to said reducing treatment to convert irregularities made of copper oxide crystals, formed by said oxidizing, to irregularities of metal copper.
14. The copper according to claim 10 , wherein the oxidant is one or more selected from the group consisting of a chlorate, a chlorite, a hypochlorite, a perchlorate and a peroxodisulfate.
15. The copper according to claim 10 , wherein the metal nobler than copper is a metal selected from the group consisting of gold, silver, platinum, palladium, rhodium, rhenium, ruthenium, osmium and iridium or an alloy containing said metal.
16. The copper according to claim 10 , wherein the roughness Rz of the surface of copper after being treated is 1 nm or more and 1000 nm or less.
17. The copper according to claim 10 , wherein after said oxidizing the surface of the copper has precise and uniform copper oxide crystals formed thereon.
18. The copper according to claim 10 , wherein after said oxidizing the surface of copper has irregularities of crystals of copper oxide formed thereon, amount of crystals of the copper oxide being 0.001 mg/cm 2 or more and 0.3 mg/cm 2 or less.