Packaged semiconductor device and method of manufacturing the packaged semiconductor device
View Patent ↗The present invention connects a first wiring portion located at one side of a substrate and a second wiring portion located at the other side. A side electrode connected to the first wiring portion is formed, and the second wiring portion is formed on an insulating layer formed on the substrate. An exposed end of the second wiring portion formed when singulated into individual semiconductor package and the side electrode are wired by ink jet system using nano metal particles. Particularly, when copper is used, the wiring by the ink jet system is performed by the reduction of a metal surface oxidation film and/or removal of organic matters by atomic hydrogen.
1. A semiconductor package connecting a first wiring portion located on one side of a substrate and a second wiring portion located on the other side of the substrate, the semiconductor package comprising:
a post electrode and a side electrode connected to the first wiring portion, said post electrode comprising a side wall, said side wall of said post electrode being covered by a first insulating layer, said first insulating layer having a first insulating end surface, said side electrode being exposed on said first insulating layer end surface; and
a second insulating layer formed on a substrate, on which the second wiring portion is formed, wherein an exposed end of said second wiring portion formed when completely singulated into individual semiconductor packages and said side electrode are wired by an ink jet system using nano metal particles, wherein a side wire connects said exposed end of said second wiring portion and said side electrode, said side wire comprising said nano metal particles, wherein said side electrode is made the same height as said post electrode connected to the first wiring portion at one side of the substrate in which an LSI formation surface and said first wiring portion are located, and is formed simultaneously with the post electrode, and moreover, is arranged so as to ride over both of a chip end and a scribe line so as to be exposed when cut into individual chips from a wafer, and when the chip is completely cut so as to be singulated into individual semiconductor packages, the side electrode which runs off to the scribe line is also simultaneously cut, so that the side electrode can be exposed and formed on the package end surface.
2. The semiconductor package according to claim 1 , wherein said nano metal particles for a wiring by the ink jet system are nano copper metal particles, and the wiring by the nano copper metal particles is performed by a reduction of the metal surface oxidation film and/or removal processing of organic matters of the wiring by atomic hydrogen.
3. The semiconductor package according to claim 1 , wherein one side of a substrate is formed with an image sensor formation surface and a transparent insulating layer on that surface, and the light from the outside is allowed to enter a light receiving element area of the image sensor formation surface through the transparent insulating film, thereby configuring an image sensor package.
4. The semiconductor package according to claim 1 , wherein a portion of said side electrode is embedded in said first insulating layer such that an outer surface of said side electrode is aligned with said first insulating end surface, said outer surface of said side electrode forming a continuous portion of said first insulating end surface, said first insulating end surface being substantially perpendicular to at least a portion of said first wiring portion and at least a portion of said second wiring portion.