Semiconductor device having projecting electrode formed by electrolytic plating, and manufacturing method thereof
View Patent ↗A semiconductor device includes a semiconductor substrate, and a plurality of wiring lines provided on one side of the semiconductor substrate, each of the wiring lines having a connection pad portion. An overcoat film is provided on the wiring lines and the one side of the semiconductor substrate, The overcoat film has a plurality of openings in parts corresponding to the connection pad portions of the wiring lines. A plurality of foundation metal layers are respectively provided on inner surfaces of the openings of the overcoat film and electrically connected to the pad portions of the wiring lines. A plurality of projecting electrodes are respectively provided on the foundation metal layers in the openings of the overcoat film.
1. A semiconductor device comprising:
a semiconductor substrate;
a plurality of wiring lines provided on one side of the semiconductor substrate, each of the wiring lines having a connection pad portion;
an overcoat film provided on the wiring lines and having a plurality of circular openings in parts corresponding to the connection pad portions of the wiring lines, each of the circular openings having an inner surface;
a plurality of foundation metal layers respectively provided on the inner surfaces of the circular openings of the overcoat film and electrically connected to the connection pad portions of the wiring lines; and
a plurality of projecting electrodes having circular cross-sections and respectively provided on the foundation metal layers in the circular openings of the overcoat film;
wherein each of the foundation metal layers has a peripheral edge portion located on top of the overcoat film around the opening of the overcoat film;
wherein each of the projecting electrodes includes a lower projecting electrode portion provided on the connection pad portion via the foundation metal layer in the opening of the overcoat film, and an upper projecting electrode portion continuing to and provided on the lower projecting electrode portion, the upper projecting electrode portion having a peripheral edge portion provided on the peripheral edge portion of the foundation metal layer; and
wherein a solder ball or a surface treated layer is provided on an outer surface of the upper projecting electrode portion of each of the projecting electrodes.
2. A semiconductor device comprising:
a semiconductor substrate including an integrated circuit on a surface thereof and a plurality of pads;
an insulating layer covering the pads and including openings corresponding to the pads;
a plurality of wiring lines provided on the insulating layer, each of the wiring lines having a connection pad portion;
an overcoat film provided on the wiring lines and having a plurality of circular openings in parts corresponding to the connection pad portions of the wiring lines, each of the circular openings having an inner surface;
a plurality of foundation metal layers respectively provided on the inner surfaces of the circular openings of the overcoat film and electrically connected to the connection pad portions of the wiring lines; and
a plurality of projecting electrodes having circular cross-sections and respectively provided on the foundation metal layers in the circular openings of the overcoat film;
wherein each of the foundation metal layers has a peripheral edge portion located on top of the overcoat film around the opening of the overcoat film;
wherein each of the projecting electrodes includes a lower projecting electrode portion provided on the connection pad portion via the foundation metal layer in the opening of the overcoat film, and an upper projecting electrode portion continuing to and provided on the lower projecting electrode portion, the upper projecting electrode portion having a peripheral edge portion provided on the peripheral edge portion of the foundation metal layer; and
wherein a solder ball or a surface treated layer is provided on an outer surface of the upper projecting electrode portion of each of the projecting electrodes.