Flash memory device
View Patent ↗A flash memory device includes control gates that are formed to completely surround the top and sides of floating gates. The control gates are located between the floating gates that are adjacent in the word line direction as well as the floating gates that are adjacent in the bit line direction. The present flash memory device reduces a shift in a threshold voltage resulting from interference among floating gates and increases an overlapping area of the floating gate and the control gates. Thus, there is an effect in that the coupling ratio can be increased.
1. A flash memory device, comprising:
a semiconductor substrate;
a tunnel dielectric film formed over the semiconductor substrate;
floating gates formed over the tunnel dielectric film and separated in an island shape on a cell basis;
an interlayer dielectric film formed over the entire surface including the floating gates; and
control gates formed over the interlayer dielectric film and arranged in a first direction while surrounding the top surface and sidewalls of the floating gates,
wherein an area where each control gate surrounds one sidewall of the corresponding floating gate is equal to an area where each control gate surrounds another sidewall of the corresponding floating gate in a word line direction.
2. The flash memory device as claimed in claim 1 , wherein a width of the control gates in a second direction perpendicular to the first direction corresponds to the sum of a width of the floating gates in the second direction, twice a thickness of the interlayer dielectric film, and overlay margin.
3. The flash memory device as claimed in claim 2 , wherein the overlay margin is the sum of a minimum thickness of the control gates that are formed at both sides of the floating gates in the second direction and misalignment margin.
4. The flash memory device as claimed in claim 3 , wherein the minimum thickness of the control gates that are formed at both sides of the floating gates in the second direction is 10 nm.
5. The flash memory device as claimed in claim 2 , wherein the floating gates are a square, circular, elliptical or polygonal shape.