Semiconductor device and method of manufacturing the same
View Patent ↗In the substrate and the epitaxial layer, isolation regions are formed to divide the substrate and the epitaxial layer into a plurality of element formation regions. Each of the isolation regions is formed by connecting first and second P type buried diffusion layers with a P type diffusion layer. By disposing the second P type buried diffusion layer between the first P type buried diffusion layer and the P type diffusion layer, a lateral diffusion width of the first P type buried diffusion layer is reduced. This structure allows a formation region of the isolation region to be reduced in size.
1. A semiconductor device comprising:
a one-conductivity-type semiconductor substrate; an opposite-conductivity-type epitaxial layer formed on the semiconductor substrate; and
a one-conductivity-type isolation region which divides the epitaxial layer into a plurality of element formation regions, wherein:
the isolation region is formed by connecting a first one-conductivity-type buried diffusion layer formed across the semiconductor substrate and the epitaxial layer, a second one-conductivity-type buried diffusion layer formed in the epitaxial layer and a first one-conductivity-type diffusion layer formed in the epitaxial layer with each other,
the first one-conductivity-type buried diffusion layer and the first one-conductivity-type diffusion layer partially overlap with each other in the epitaxial layer,
an impurity concentration peak of the first one-conductivity-type buried diffusion layer is positioned closer to the substrate than a center of the epitaxial layer, and
an impurity concentration peak of the second one-conductivity-type buried diffusion layer and an impurity concentration peak of the first one-conductivity-type diffusion layer are positioned closer to the surface of the epitaxial layer than the center of the epitaxial layer.
2. The semiconductor device according to claim 1 , wherein
the second one-conductivity-type buried diffusion layer has the impurity concentration peak positioned closer to the surface of the epitaxial layer than the overlapping region of the first one-conductivity-type buried diffusion layer and the first one-conductivity-type diffusion layer, and
the second one-conductivity-type buried diffusion layer is formed so as to overlap with the first one-conductivity-type buried diffusion layer and the first one-conductivity-type diffusion layer, thus including the overlapping region.
3. The semiconductor device according to one of claims 1 and 2 , wherein
a bipolar transistor is formed in one of the element formation regions and an opposite-conductivity-type diffusion layer is formed between the isolation region and a second one-conductivity-type diffusion layer as a base region of the bipolar transistor, and
the second one-conductivity-type buried diffusion layer forms a junction region with the opposite-conductivity-type diffusion layer.
4. The semiconductor device according to claim 3 , wherein
the opposite-conductivity-type diffusion layer is disposed so as to surround the second one-conductivity-type diffusion layer, and
the junction region is formed across a formation region of the opposite-conductivity-type diffusion layer.