Semiconductor device and fabricating method thereof
View Patent ↗A semiconductor device, such as a positive channel metal-oxide semiconductor (PMOS) transistor, and a fabricating method thereof are provided. The semiconductor device includes: a gate insulation layer and a gate electrode, a semiconductor substrate, a spacer formed on side walls of the gate insulation layer and the gate electrode, a lightly doped drain (LDD) area formed on the semiconductor substrate at both sides of the gate electrode, a source/drain area formed on the semiconductor substrate at both sides of the gate electrode, and an oxide-nitride layer formed on the gate electrode and on the source/drain area.
1. A method for fabricating a semiconductor device, the method comprising:
forming a gate insulation layer and a gate electrode at predetermined areas of a semiconductor substrate;
forming low density impurity areas at both sides of the gate electrode on the semiconductor substrate;
forming a spacer at side walls of the gate insulation layer and the gate electrode, after forming the low density impurity areas;
forming a thermal oxide layer on an exposed portion of the semiconductor substrate, adjacent to the spacer without overlapping with the spacer, and on the gate electrode, after forming the spacer;
forming a source/drain area on the semiconductor substrate by implanting high density impurities at both sides of the gate electrode using the gate electrode and the spacer as an implantation mask, after forming the thermal oxide layer;
forming an oxide/nitride layer on the semiconductor substrate by processing the thermal oxide layer with an nitrogen plasma process; and
performing an annealing process for activating the impurities of the source/drain area.
2. The method according to claim 1 , wherein forming the thermal oxide layer comprises performing a rapid thermal process (RTP) in oxygen atmosphere at a temperature of about 700° C. to 800° C.
3. The method according to claim 1 , wherein the impurities comprise Boron ions.
4. The method according to claim 3 , wherein the Boron ions comprise 11 AMU (atomic mass unit) Boron ions.
5. The method according to claim 1 , wherein the thermal oxide layer is formed on the gate electrode and on the source/drain area.
6. The method according to claim 1 , wherein forming the oxide-nitride layer comprises performing the nitrogen plasma process under predetermined conditions including a radio frequency (RF) power of about 150 W to 200 W, a nitride flow of about 350 sccm to 450 sccm, a pressure of about 9 torr to 22 torr, and a process time of about 100 sec to 120 sec.
7. The method according to claim 1 , wherein performing the annealing process comprises activating the impurities using a spike annealing process.
8. The method according to claim 7 , wherein the spike annealing process is performed at a temperature of about 900° C. to 1100° C.