Manufacturing method for forming an integrated circuit device and corresponding integrated circuit device
View Patent ↗The present invention provides a manufacturing method for forming an integrated circuit device and to a corresponding integrated circuit device. The manufacturing method for forming an integrated circuit device comprises the steps of: forming a first level on a substrate; forming a second level above the first level; forming a cap layer on the second level which covers a first region of the level and leaves a second region uncovered; and simultaneously etching a first contact hole in the first region and a second contact hole in the second region such that the etching is selective to the cap layer in the second region and proceeds to a greater depth in the first region.
1. A manufacturing method for forming an integrated circuit device comprising the steps of:
forming a first level on a substrate;
forming a second level above the first level;
forming a cap layer on the second level which covers a first region of the level and leaves a second region uncovered; and
simultaneously etching a first contact hole in the first region and a second contact hole in the second region such that the etching is selective to the cap layer in the first region and proceeds to a deeper level in the second region, wherein the cap layer is selected from the group comprising silicon carbide and silicon nitride.
2. The manufacturing method of claim 1 , wherein the first level is a metal level including a fuse region comprising a fuse and the second level is a metal level including a pad region comprising a contact pad.
3. The manufacturing method of claim 2 , wherein the cap layer is deposited in the fuse region and the pad region, and thereafter at least partially removed from the fuse region.
4. The manufacturing method of claim 1 , wherein the cap layer is selectively grown on the pad in the pad region.
5. The manufacturing method of claim 1 , further comprising the step of selectively removing at least a part of the cap layer from the pad.
6. The manufacturing method of claim 2 , wherein the second metal level is formed as a further Cu damascene layer comprising the pad made of a Cu containing material embedded in a second insulating layer.
7. The manufacturing method of claim 2 , wherein at least one protective layer is formed on the second metal level after the cap layer has been formed and before the step of etching.
8. The manufacturing method of claim 1 , wherein the cap layer selected from the group comprising CoWP and NiPdAu.
9. The manufacturing method of claim 1 , wherein the first and second levels are metal levels including structured conductors and wherein the cap layer covers at least one conductor in the second region.
10. The manufacturing method of claim 9 , wherein the cap layer is deposited in the first region and the second region, and thereafter at least partially removed from the first region.
11. The manufacturing method of claim 9 , wherein the first level is formed as damascene layer comprising a fuse comprising a Cu comprising material embedded in a first insulating layer.
12. The manufacturing method of claim 9 , wherein the second level is formed as a damascene layer comprising the pad comprising a Cu comprising material embedded in a second insulating layer.