Method to prevent alloy formation when forming layered metal oxides by metal oxidation
View Patent ↗The present method of fabricating a resistive memory device includes the steps of providing a first electrode, oxidizing a portion of the first electrode with an oxidizing agent, providing a metal body on the oxidized portion of the first electrode, oxidizing the entire metal body with an oxidizing agent, and providing a second electrode on the oxidized metal body.
1. A method of fabricating an electronic device comprising:
providing a first body;
reacting a portion of the first body with an agent;
providing a second body on the reacted portion of the first body; and
reacting the entire second body with an agent wherein the first body is Ni and the second body is Cu.
2. A method of fabricating an electronic device comprising:
providing a first body;
oxidizing a portion of the first body;
providing a second body on the oxidized portion of the first body; and
oxidizing the entire second body wherein the first body is Ni and the second body is Cu.
3. The method of claim 2 wherein the first body is a metal body.
4. The method of claim 2 wherein the second body is a metal body.
5. A method of fabricating a resistive memory device comprising:
providing a first electrode;
reacting a portion of the first electrode with an agent;
providing a metal body on the reacted portion of the first electrode;
reacting the entire metal body with an agent; and
providing a second electrode on the reacted metal body wherein the first electrode is Ni and the metal body is Cu.
6. The method of claim 5 wherein the first electrode is metal.
7. The method of claim 6 wherein the agent with which the portion of the first electrode reacts is an oxidizing agent.
8. The method of claim 6 wherein the agent with which the metal body reacts is an oxidizing agent.
9. The method of claim 5 and further comprising the device incorporated in a system.
10. The method of claim 9 wherein the system is selected from the group consisting of a hand-held device, a vehicle, and a computer.