Semiconductor device including ground and power-supply planes and a dielectric layer between the ground and power-supply planes
View Patent ↗A high dielectric loss tangent layer is provided in a dielectric layer between a power-supply plane and a ground plane. The high dielectric loss tangent layer is arranged such that its edge is located between the edge of the power-supply plane and the edge of the ground plane. The edge of the high dielectric loss tangent layer is preferably separated by a predetermined distance or more from the edge of the power-supply plane or the edge of the ground plane which is located on the inner side.
1. A semiconductor device, comprising:
a substrate having a ground plane and a power-supply plane arranged to face each other with a dielectric layer interposed between the ground plane and the power-supply plane, an edge of the ground plane being offset from an edge of the power-supply plane in a direction orthogonal to a thickness direction,
wherein a high dielectric loss tangent layer having a higher tan δ than a periphery is provided in the dielectric layer between the edge of the ground plane and the edge of the power-supply plane in the direction orthogonal to the thickness direction, and
an edge of the high dielectric loss tangent layer located outside one of the ground plane and the power-supply plane in the direction orthogonal to the thickness direction is positioned between the edge of the ground plane and the edge of the power-supply plane in the direction orthogonal to the thickness direction.
2. The semiconductor device according to claim 1 , wherein the edge of the high dielectric loss tangent layer is located outside of the power-supply plane in the direction orthogonal to the thickness direction and is separated by a predetermined distance or more from the edge of the power-supply plane in the direction orthogonal to the thickness direction.
3. The semiconductor device according to claim 2 , wherein the predetermined distance is set to 0.8d where d denotes a thickness of the dielectric layer.
4. The semiconductor device according to claim 2 , wherein the predetermined distance is set to a greater value as the tan δ of the high dielectric loss tangent layer becomes greater.
5. The semiconductor device according to claim 1 , wherein the edge of the ground plane is located outside the edge of the power-supply plane in the direction orthogonal to the thickness direction, and the high dielectric loss tangent layer is arranged closer, in the thickness direction, to the power-supply plane.
6. The semiconductor device according to claim 1 , wherein the tan δ of the high dielectric loss tangent layer is set to 0.2 or higher.
7. The semiconductor device according to claim 1 , wherein the edge of the high dielectric loss tangent layer is located outside of the ground plane in the direction orthogonal to the thickness direction and is separated by a predetermined distance or more from the edge of the ground plane in the direction orthogonal to the thickness direction.
8. The semiconductor device according to claim 1 , wherein the edge of the ground plane is located outside the edge of the power-supply plane in the direction orthogonal to the thickness direction.
9. A substrate for a semiconductor device, comprising:
a power-supply plane;
a ground plane including an edge which is offset from an edge of the power-supply plane in a direction orthogonal to a thickness direction of the substrate; and
a dielectric formed between the ground plane and the power-supply plane, and including:
a high dielectric loss tangent layer including an edge which is formed outside one of the ground plane and the power-supply plane in the direction orthogonal to the thickness direction and between the edge of the ground plane and the edge of the power-supply plane in the direction orthogonal to the thickness direction; and
an other layer which is formed outside of the high dielectric loss tangent layer in the direction orthogonal to the thickness direction, and includes a tan δ which is less than a tan δ of the high dielectric loss tangent layer.
10. The substrate according to claim 9 , wherein the edge of the high dielectric loss tangent layer is located outside of the power-supply plane in the direction orthogonal to the thickness direction and is separated by a predetermined distance from the edge of the power-supply plane in the direction orthogonal to the thickness direction.
11. The substrate according to claim 9 , wherein the other layer of the dielectric is formed between the ground plane and the high dielectric loss tangent layer and between the power-supply plane and the high dielectric loss tangent layer.
12. The substrate according to claim 9 , wherein the other layer of the dielectric is formed between the ground plane and the high dielectric loss tangent layer.
13. The substrate according to claim 9 , wherein the edge of the high dielectric loss tangent layer is formed outside the power-supply plane in the direction orthogonal to the thickness direction, and the power-supply plane is formed on a surface of the high dielectric loss tangent layer.
14. The substrate according to claim 9 , further comprising:
a first solder resist layer formed on a side of the power-supply plane which is opposite the dielectric; and
a second solder resist layer formed on a side of the ground plane which is opposite the dielectric.
15. The substrate according to claim 14 , wherein the edge of the high dielectric loss tangent layer is formed outside the power-supply plane in the direction orthogonal to the thickness direction, and the first solder resist layer is formed outside of the power-supply plane in the direction orthogonal to the thickness direction.