GaN single-crystal substrate and method for producing GaN single crystal
View Patent ↗A GaN single-crystal substrate has a substrate surface in which polarity inversion zones are included. The number density of the polarity inversion zones in the substrate surface is not more than 20 cm −2 . A GaN single crystal production method includes introducing group III and V raw material gases on a substrate, and growing a GaN single crystal on the substrate. The growth temperature is within the range of not less than 1100° C. and not more than 1400° C., the group V to III raw material gas partial pressure ratio (V/III ratio) is within the range of not less than 0.4 and not more than 1, and the number density of polarity inversion zones in a surface of the substrate is not more than 20 cm −2 .
1. A GaN single-crystal substrate, comprising:
a substrate surface comprising a frontside and a backside; and
polarity inversion zones extending from the frontside to the backside,
wherein the polarity inversion zones are formed in line shapes and are concentrated in a specified position to exist in the substrate surface, and the polarity inversion zones have a number density of the polarity inversion zones in the substrate surface within a range of not more than 20 cm −2 , and
wherein a maximum outside diameter of the polarity inversion zones is not more than 1 mm.
2. The GaN single-crystal substrate according to claim 1 , wherein a ratio of a sum of respective areas of the polarity inversion zones to a total area of the substrate surface is equal to or less than 2%.
3. A GaN free-standing substrate, comprising:
a first substrate side comprising a frontside and a backside; and
a plurality of inversion domains extending from the frontside to the backside,
wherein the inversion domains are formed in line shapes concentrated in a specified position to exist in the substrate surface, and the polarity inversion zones have a number density of the plurality of inversion domains within the first substrate side within a range of equal to or less than 20 cm −2 , and
wherein the plurality of inversion domains have a maximum outside diameter equal to or less than 1 mm.
4. The GaN free-standing substrate according to claim 3 , wherein a ratio of a sum of respective areas of the inversion domains to an area of the first substrate side is equal to or less than 2%.
5. The GaN free-standing substrate according to claim 3 , wherein the inversion domains comprise polarity inversion zones.
6. The GaN free-standing substrate according to claim 3 , further comprising:
a second substrate side facing away from the first substrate side,
wherein the inversion domains substantially extend from the first substrate side to the second substrate side.
7. The GaN free-standing substrate according to claim 3 , wherein the inversion domains have N polarity.
8. The GaN single-crystal substrate according to claim 1 , wherein the polarity inversion zones are accompanied by high impurity concentration regions disposed on a periphery of the polarity inversion zones, the high impurity concentration regions having a width in a range of 10 to 100 times a diameter of the polarity inversion zones.
9. The GaN free-standing substrate according to claim 3 , wherein the inversion domains are accompanied by high impurity concentration regions disposed on a periphery of the inversion domains, the high impurity concentration regions having a width in a range of 10 to 100 times a diameter of the inversion domains.
10. The GaN single-crystal substrate according to claim 1 , wherein the polarity inversion zones extend from an exposed area of the frontside to the backside of the substrate surface.
11. The GaN single-crystal substrate according to claim 1 , wherein a region that comprises the polarity inversion, zones is inverted relative to a surrounding crystal of said region.
12. The GaN single-crystal, substrate according to claim 1 , wherein a ratio of a sum of respective areas of the polarity inversion zones to a total area of the substrate frontside is equal to or less than 2%.
13. The GaN single-crystal substrate according to claim 1 , wherein the polarity inversion zones are formed apart from each other on the frontside of the substrate surface.
14. The GaN single-crystal substrate according to claim 1 , wherein the number density of the polarity inversion zones in the substrate surface is equal to or more than 1 cm −2 .
15. The GaN single-crystal substrate according to claim 1 , wherein the number density of the polarity inversion zones in the substrate surface is more than 0 cm −2 .