Flip-chip package covered with tape
View Patent ↗A manufacturing method of a semiconductor device includes arranging a melted resin on a substrate, arranging a semiconductor chip on the melted resin, pressing the semiconductor chip and flip-chip mounting the semiconductor chip on the substrate, and hardening the melted resin with the melted resin being subjected to a fluid pressure and forming a resin portion.
1. A manufacturing method of a semiconductor device comprising:
arranging a melted resin on a substrate;
arranging a semiconductor chip on the melted resin;
arranging a resin sheet on the melted resin and the semiconductor chip,
the resin sheet comprising a plurality of holes;
absorbing the semiconductor chip to a mounting portion through the plurality of holes;
pressing the mounting portion with the semiconductor chip to flip-chip mount the semiconductor chip on the substrate; and
hardening the melted resin to form a resin portion by applying a fluid pressure to the melted resin through the resin sheet.
2. The method as claimed in claim 1 wherein the arranging a resin sheet on the melted resin and on the semiconductor chip comprises adhering the resin sheet to the melted resin and the semiconductor chip with an adhesive agent.
3. The method as claimed in claim 2 , wherein the arranging a resin sheet comprises pressing the resin sheet to the substrate so as to surround the semiconductor chip.
4. The method as claimed in claim 1 , wherein the fluid pressure is generated by a gas.
5. The method as claimed in claim 1 , wherein the resin sheet has a higher melting point than the melted resin.
6. A method for fabricating a flip-chip package, the method comprising:
dispensing molten resin on a substrate;
covering a semiconductor chip with a resin sheet, the resin sheet comprising a plurality of holes;
absorbing the semiconductor chip to a mounting portion through the plurality of holes;
clamping the semiconductor chip on the substrate with the mounting portion such that the semiconductor chip is dipped in the molten resin; and
applying, by a press portion, a fluid pressure to the molten resin through the resin sheet,
wherein the molten resin is hardened through the application of the fluid pressure.
7. The method as claimed in claim 6 , further comprising:
in response to hardening the molten resin, forming a resin portion from the molten resin.
8. The method as claimed in claim 6 , further comprising:
flip-chip mounting the semiconductor chip on the substrate by affixing the semiconductor chip to the substrate through the plurality of holes comprising the resin sheet.
9. The method as claimed in claim 6 , wherein the resin sheet is adhered to the semiconductor chip with an adhesive agent.
10. The method as claimed in claim 7 , wherein a formation of a void in the resin portion is restrained as a result of the application of the fluid pressure to the molten resin.
11. The method as claimed in claim 7 , wherein a reduction of adhesiveness in the resin portion is restrained as a result of the application of the fluid pressure to the molten resin.
12. The method as claimed in claim 7 , wherein a reduction of a thermal conductivity of the resin portion is restrained as a result of the application of the fluid pressure to the molten resin.
13. The method as claimed in claim 7 , wherein a reduction of a resistance to humidity of the resin portion is restrained as a result of the application of the fluid pressure to the molten resin.
14. The method as claimed in claim 6 , wherein the resin sheet has a higher melting point than the melted resin.