ELECTRONIC DEVICE HAVING A DOPED REGION WITH A GROUP 13 ATOM
An electronic device includes a memory cell. The memory cell includes a semiconductor region, a first current-carrying electrode adjacent to the semiconductor region, and a first dopant-containing region adjacent to a first current-carrying electrode. The semiconductor region includes a Group 14 atom and the first dopant-containing region includes a Group 13 atom. The Group 13 atom has an atomic number greater than the atomic number of the Group 14 atom.
1 . An electronic device including a memory cell, wherein the memory cell comprises:
a semiconductor region, wherein the semiconductor region includes a Group 14 atom;
a first current-carrying electrode adjacent to the semiconductor region; and
a first dopant-containing region adjacent to a first current-carrying electrode, wherein the first dopant-containing region includes a Group 13 atom having an atomic number greater than the atomic number of the Group 14 atom.
2 . The electronic device of claim 3 , wherein the Group 13 atom includes indium.
3 . The electronic device of claim 1 , wherein the memory cell further comprises a second dopant-containing region adjacent to the first current-carrying electrode, wherein the second dopant-containing region includes a Group 13 atom having an atomic number greater than the atomic number of the Group 14 atom.
4 . The electronic device of claim 1 , wherein the memory cell further comprises a second dopant-containing region within the substrate adjacent to a second current carrying electrode, wherein the second dopant-containing region includes a Group 13 atom having an atomic number greater than the atomic number of the Group 14 atom.
5 . The electronic device of claim 4 , wherein the memory cell further comprises:
a third dopant-containing region within the substrate adjacent to the first current carrying electrode; and
a fourth dopant-containing region within the substrate adjacent to the second current carrying electrode,
wherein the third and fourth dopant-containing regions include a Group 13 atom having an atomic number greater than the atomic number of the Group 14 atom.
6 . The electronic device of claim 1 , wherein the memory cell further comprises a control electrode adjacent to the first current-carrying electrode and the semiconductor region.
7 . The electronic device of claim 6 , wherein the memory cell further comprises a charge-storage layer, wherein the charge-storage layer is disposed between the control electrode and semiconductor region.
8 . The electronic device of claim 7 , wherein the charge storage layer includes silicon nitride.
9 . The electronic device of claim 1 , wherein the memory cell is a nonvolatile memory cell.
10 . A method of forming an electronic device comprising:
doping a semiconductor layer with a Group 13 element, wherein the semiconductor layer has a primary surface and includes a Group 14 element, the Group 13 element having an atomic number greater than the atomic number of the Group 14 element;
forming a first current-carrying electrode within the semiconductor layer,
wherein the electronic device includes a memory cell, and within the memory cell, the first doped region is adjacent to the first current-carrying electrode.
11 . The method of claim 10 , wherein the Group 13 element includes indium.
12 . The method of claim 10 , wherein doping includes implanting at a first angle, the first angle less than about 8° from perpendicular to the primary surface.
13 . The method of claim 12 , wherein doping includes implanting at a second angle, the second angle at least about 8° from perpendicular to the primary surface.
14 . The method of claim 10 , further comprising forming a control electrode before doping the semiconductor layer with the Group 13 element.
15 . The method of claim 14 , further comprising forming a charge-storage layer before forming the control electrode.
16 . The method of claim 15 , wherein the charge-storage layer includes silicon nitride.
17 . The method of claim 10 , further comprising nitriding an oxide layer before doping the semiconductor layer with the Group 13 element.
18 . An electronic device including a nonvolatile memory cell, wherein the nonvolatile memory cell comprises:
a substrate;
a charge storage stack overlying the substrate;
a control gate electrode overlying the charge storage stack;
indium atoms within the substrate, wherein the indium atoms have a first peak concentration at a first depth and a second peak concentration at a second depth that is deeper than the first depth; and
source/drain regions within the substrate, wherein within the nonvolatile memory cell, the source/drain regions are adjacent to the indium atoms.
19 . The electronic device of claim 18 , wherein:
the source/drain regions include a particular source/drain region; and
adjacent to the particular source/drain region, the indium atoms lie within a first doped region that includes the first peak concentration and a second doped region that includes the second peak concentration, wherein the first doped region and the second doped region are separate doped regions.
20 . The electronic device of claim 18 , wherein:
the source/drain regions include a particular source/drain region; and
adjacent to the particular source/drain region, the indium atoms lie within a doped region that includes a bimodal distribution of indium atoms that includes the first peak concentration and the second peak concentration.