Method for fabricating device structures having a variation in electrical conductivity

1. A method for fabricating a semiconductor device comprising:

forming a device structure;

forming a radiation absorbing layer comprising a layer of hydrogen impregnated amorphous carbon material or a carbon-hydrogen material incorporating additional species and forming a mask on the radiation absorbing layer and etching at least a portion of the radiation absorbing layer using the resist mask as an etching mask to form a layer having a continuous spatial variation in radiation absorbance overlying the device structure;

irradiating the device structure,

wherein the radiation absorbing layer imparts a spatial variation in electrical conductivity to the device structure substantially corresponding to the spatial variation in absorbance of the radiation absorbing layer,

such that the electrical conductivity of the device structure is independent of its physical dimensions.

2. The method of claim 1 , wherein forming a radiation absorbing layer having a continuous spatial variation in absorbance comprises forming a radiation absorbing layer having a thickness variation over the device structure.

3. The method of claim 2 , wherein forming a radiation absorbing layer having a thickness variation over the device structure comprises forming a mask pattern on a portion of the radiation absorbing layer and removing all or a portion of the radiation absorbing layer exposed by the mask pattern.

4. The method of claim 2 , wherein forming a radiation absorbing layer having a thickness variation over the device structure comprises forming the mask to have a spatial variation in etching characteristics on the radiation absorbing layer and etching the mask and portions of the radiation absorbing layer.

5. The method of claim 4 , wherein forming the mask to have a spatial variation in etching characteristics comprises forming the mask to have regions of differing thicknesses.

6. The method of claim 4 further comprising etching the mask and the radiation absorbing layer, such that a remaining thickness of the radiation absorbing layer varies in relation to the spatial variation in etching characteristics of the mask.

7. The method of claim 1 , wherein forming a radiation absorbing layer having a variation in absorbance further comprises removing a portion of the radiation absorbing layer over the device structure and forming a second radiation absorbing layer on the device structure, such that at least two regions are formed in the device structure having different electrical conductivty.

8. The method of claim 7 , wherein forming a second radiation absorbing layer comprises forming a layer having a composition that differs from a removed portion of the radiation absorbing layer.

9. The method of claim 1 , wherein irradiating the device structure comprises laser annealing the device structure.

10. The method of claim 1 , wherein forming a device structure comprises forming a sheet resistor.

11. The method of claim 10 , wherein imparting a variation in electrical conductivity of the device structure comprises imparting a variation in sheet resistance of the sheet resistor.

12. The method of claim 1 , wherein forming a device structure comprises forming a plurality of sheet resistors, wherein at least two of the plurality of sheet resistors have different sheet resistance values.

13. The method of claim 1 , wherein forming a device structure comprises forming a portion of a transistor.

14. The method of claim 1 , wherein irradiating comprises flash annealing the device structure.

15. A method for forming device structures having a variation in electrical conductivity, the method comprising:

forming a plurality of device structures having substantially the same area dimensions;

forming a radiation absorbing layer comprising a layer of homogeneous material;

forming a mask on the radiation absorbing layer and etching at least a portion of the radiation absorbing layer using the resist mask as an etching mask to form a layer having a continuous spatial variation in absorbance overlying the device structures; and

imparting electrical conductivity to the device structures,

wherein the electrical conductivity of at least two device structures differs in accordance with the spatial variation in absorbance of the radiation absorbing layer.

16. The method of claim 15 , wherein imparting electrical conductivity comprises irradiating the device structures and annealing the device structures.

17. The method of claim 15 , wherein etching the radiation absorbing layer comprises forming a radiation absorbing layer having a differing thickness over each of the at least two device structures.

18. The method of claim 17 , wherein forming mask seven of this paper comprises forming a resist mask having regions of differing thickness over each of the at least two device structures.

19. The method of claim 15 , wherein forming a plurality of device structures comprises forming a plurality of sheet resistors.

20. A method for fabricating sheet resistors comprising:

defining sheet resistors on a semiconductor substrate, wherein the sheet resistors are located intermediate to transistor gate electrodes and source and drain regions;

forming a radiation absorbing layer and forming a mask on the radiation absorbing layer and etching at least a portion of the radiation absorbing layer using the resist mask as an etching mask to form a layer having a spatial variation in absorbance overlying the resistors;

irradiating the resistors through the radiation absorbing layer; and

wherein the electrical resistivity of the resistors varies in substantial correspondence with the spatial variation in absorbance of the radiation absorbing layer, such that sheet resistance values of the sheet resistors are substantially independent of their surface area.

21. The method of claim 20 , wherein defining sheet resistors comprises forming resistor structures and doping the resistor structures with a conductivity-determining dopant.

22. The method of claim 21 , wherein irradiating the sheet resistors comprises laser annealing.

23. The method of claim 20 , wherein defining resistors comprises forming a standardized uniform resistor size on the semiconductor substrate, and wherein at least two of the resistors have differing resistance values.

24. The method of claim 20 , wherein forming a radiation absorbing layer comprises forming a carbon-hydrogen material incorporating additional species, the additional species comprising one or more of nitrogen, boron, phosphorus, and fluorine.