Semiconductor device with magnetic powder mixed therein and manufacturing method thereof
View Patent ↗A semiconductor device includes a semiconductor substrate on one side of which an integrated circuit and a plurality of connection pads connected to the integrated circuit are provided. An insulating film is provided on the plurality of connection pads except for parts of the connection pads and on the one side of the semiconductor substrate. A plurality of wiring lines are provided to be electrically connected to the integrated circuit via the connection pads, each of the wiring lines having a connection pad portion. A plurality of columnar electrodes are respectively provided on one side of the connection pad portions of the wiring lines. A sealing film is provide on the peripheries of the columnar electrodes to cover the integrated circuit and which is provided. At least one of the insulating film and the sealing film is formed of a resin in which magnetic powder is mixed.
1. A semiconductor device comprising:
a semiconductor substrate;
an insulating layer provided on the semiconductor substrate; and
a plurality of wiring lines and at least one spiral thin film induction element provided on the insulating layer,
wherein a magnetic film is provided on at least one part of the insulating layer under said at least one thin film induction element;
wherein the magnetic film comprises a magnetic sheet provided on the insulating layer under the thin film induction element;
wherein an insulating film made of a resin is provided on the insulating layer except for a region where the magnetic sheet is disposed; and
wherein an upper insulating film made of a resin is provided between (i) the wiring lines and the thin film induction element, and (ii) the magnetic film and the insulating film.
2. The semiconductor device according to claim 1 , wherein a thin film induction element wiring line is provided on the insulating layer under the magnetic film, and an inner end of the thin film induction element is connected to a connection pad portion of the thin film induction element wiring line via an opening provided in the magnetic film.
3. The semiconductor device according to claim 1 , wherein the wiring lines and said at least one thin film induction element are made of a same material.
4. The semiconductor device according to claim 1 , wherein the insulating film and the upper insulating film are formed of a same material.
5. The semiconductor device according to claim 1 , further comprising columnar electrodes provided on connection pad portions of the plurality of wiring lines.
6. The semiconductor device according to claim 5 , further comprising a sealing film provided on peripheries of the columnar electrodes.
7. The semiconductor device according to claim 6 , further comprising solder balls provided on the columnar electrodes.