Semiconductor device and wire bonding method
View Patent ↗A semiconductor device with improved bondability between a wire and a bump and cutting property of the wire to improve the bonding quality. In the semiconductor device, a wire is stacked on a pad as a second bonding point to form a bump having a sloped wedge and a first bent wire convex portion, and a wire is looped from a lead as a first bonding point to the bump and is pressed to the sloped wedge of the bump with a face portion of a tip end of a capillary to bond the wire to the bump. At the same time, the wire is pressed to the first bent wire convex portion using an inner chamfer of a bonding wire hole in the capillary to form a wire bent portion having a bow-shaped cross section. The wire is pulled up and cut at the wire bent portion.
1. A semiconductor device for connecting between a first bonding point and a second bonding point using a wire, the device comprising:
a bump that is formed by folding the wire to be stacked on the second bonding point, the bump including a bent wire convex portion on an opposite side from the first bonding point; and
the wire that extends from a side of the first bonding point toward the bump and is bonded on an upper surface of the bump, the wire having a cut surface smaller than a cross-section of the wire on a side of the bent wire convex portion.
2. A semiconductor device for connecting between a first bonding point and a second bonding point using a wire, the device comprising:
a bump that is formed by folding the wire to be stacked on the second bonding point, the bump including bent wire convex portions on a side of the first bonding point and an opposite side from the first bonding point; and
the wire that extends from a side of the first bonding point toward the bump and is bonded on an upper surface of the bump, the wire having a cut surface smaller than a cross-section of the wire on a side of the bent wire convex portion that is on the opposite side from the first bonding point.
3. The semiconductor device according to claim 1 , wherein
the bump is provided with a sloped wedge formed by folding the wire to be stacked on the second bonding point and having a sloped surface on the upper surface of the bump, and
the wire is bonded to the upper surface of the bump along the sloped wedge.
4. The semiconductor device according to claim 2 , wherein
the bump is provided with a sloped wedge formed by folding the wire to be stacked on the second bonding point and having a sloped surface on the upper surface of the bump, and
the wire is bonded to the upper surface of the bump along the sloped wedge.
5. The semiconductor device according to claim 2 , wherein
the bump is provided with a sloped wedge formed by folding the wire to be stacked on the second bonding point and having a sloped surface whose height decreases from the first bonding point toward the second bonding point, and
the wire is bonded to the upper surface of the bump along the sloped wedge.
6. The semiconductor device according to claim 1 , wherein the cut surface has a bow-shaped cross section.
7. The semiconductor device according to claim 2 , wherein the cut surface has a bow-shaped cross section.
8. A semiconductor device for connecting between a first bonding point and a second bonding point using a wire, the device comprising:
a bump that is formed by folding the wire to be stacked on the second bonding point, the bump including a bent wire convex portion on an opposite side from the first bonding point; and
the wire that extends from a side of the first bonding point toward the bump and is bonded on an upper surface of the bump, the wire having a tensile cut surface smaller than a shear cut surface and a cross-section of the wire on a side of the bent wire convex portion.
9. A semiconductor device for connecting between a first bonding point and a second bonding point using a wire, the device comprising:
a bump that is formed by folding the wire to be stacked on the second bonding point, the bump including bent wire convex portions on a side of the first bonding point and an opposite side from the first bonding point; and
the wire that extends from a side of the first bonding point toward the bump and is bonded on an upper surface of the bump, the wire having a tensile cut surface smaller than a shear cut surface and a cross-section of the wire on a side of the bent wire convex portion that is on the opposite side from the first bonding point.
10. The semiconductor device according to claim 8 , wherein
the bump includes a sloped wedge provided on an upper surface of the bump and on the side of the first bonding point, and having a sloped surface whose height decreases from the first bonding point toward the second bonding point, and
the wire is bonded to the upper surface of the bump along the sloped wedge.
11. The semiconductor device according to claim 9 , wherein
the bump includes a sloped wedge provided on an upper surface of the bump and on the side of the first bonding point, and having a sloped surface whose height decreases from the first bonding point toward the second bonding point, and
the wire is bonded to the upper surface of the bump along the sloped wedge.
12. The semiconductor device according to claim 9 , wherein
the bump includes a sloped wedge provided on an upper surface of the bum so as to be adjacent to the bent wire convex portion on the side of the first bonding point, and having a sloped surface whose height decreases from the first bonding point toward the second bonding point, and
the wire is bonded to the upper surface of the bump along the sloped wedge.
13. The semiconductor device according to claim 8 , wherein
the shear cut surface is substantially parallel with a surface of the semiconductor device including the second bonding point, and
the tensile cut surface has a bow-shaped cross section.
14. The semiconductor device according to claim 9 , wherein
the shear cut surface is substantially parallel with a surface of the semiconductor device including the second bonding point, and
the tensile cut surface has a bow-shaped cross section.
15. The semiconductor device according to claim 1 , wherein the wire is made from gold and said second bonding point is a material which has poor bondability to gold.