Low-stain polishing composition
View Patent ↗The invention is an aqueous composition useful for chemical mechanical polishing of a patterned semiconductor wafer containing a copper interconnect metal. The aqueous composition includes an oxidizer, an inhibitor for the copper interconnect metal, 0.001 to 15 weight percent of a water soluble modified cellulose, non-saccaride water soluble polymer, 0 to 15 complexing agent for the copper interconnect metal, 0 to 15 weight percent phosphorus compound, 0.05 to 20 weight percent of an acid compound that is capable of complexing copper ions, and water; and the solution has an acidic pH.
1. An aqueous composition useful, for chemical mechanical polishing of a patterned semiconductor wafer containing a copper interconnect metal comprising an oxidizer, 0.01 to 15 weight percent benzotriazole inhibitor for the copper interconnect metal, 0.001 to 15 weight percent of a water soluble modified cellulose, 0.005 to 5 weight percent non-saccaride water soluble polymer, the non-saccaride polymer selected from at least one of copolymers formed from acrylic acid monomer and methacrylic acid monomer and amphiphilic polymers, the amphiphilic polymer being a block copolymer comprised of hydrophobic and hydrophilic segments, 0 to 15 weight percent complexing agent for the copper interconnect metal, 0 to 15 weight percent phosphorus compound, 0.4 to 5 weight percent diglycine, the diglycine being capable of complexing copper ions, and water; and the composition being abrasive-free and having an acidic pH.
2. The composition of claim 1 wherein the water soluble modified cellulose is modified with a carboxylic acid functionality selected from at least one of carboxy methyl cellulose, agar gum, arabic gum, ghatti gum, karaya gum, guar gum, pectin, locust bean gum, tragacantb gums, tamarind gum, carrageenan gum, and xantham gum, modified starch, alginic acid, mannuronic acid, guluronic acid, and their derivatives and copolymers.
3. The composition of claim 2 wherein the water soluble modified cellulose is carboxy methyl cellulose.
4. An aqueous composition useful for chemical mechanical polishing of a patterned semiconductor wafer containing a copper interconnect metal comprising 0.5 to 25 weight percent oxidizer, 0.01 to 15 weight percent benzotriazole inhibitor for the copper interconnect metal, 0.005 to 5 weight percent of a water soluble modified cellulose, 0.005 to 5 weight percent non-saccaride water soluble polymer, the non-saccaride polymer selected from at least one of copolymers formed from acrylic acid monomer and methacrylic acid monomer and amphiphilic polymers, the amphiphilic polymer being a block copolymer comprised of hydrophobic and hydrophilic segments, 0.05 to 10 weight percent phosphorus compound, 0.01 to 15 weight percent complexing agent for the copper interconnect metal, 0.4 to 5 weight percent diglycine, the diglycine being capable of complexing copper ions, and water; and the composition being abrasive-free and having an acidic pH.
5. A method for CMP of a semiconductor wafer containing a metal comprising, a) contacting the wafer with a polishing composition, the polishing composition comprising an oxidizer, 0.01 to 15 weight percent benzotriazole inhibitor for the copper interconnect metal, 0.001 to 15 weight percent of a water soluble modified cellulose, 0.005 to 5 weight percent non-saccaride water soluble polymer, the non-saccaride polymer selected from at least one of copolymers formed from acrylic acid monomer and methacrylic acid monomer and amphiphilic polymers, the amphiphilic polymer being a block copolymer, comprised of hydrophobic and hydrophilic segments, 0 to 15 weight percent complexing agent for the copper interconnect metal, 0 to 15 weight percent phosphorus compound, 0.4 to 5 weight percent diglycine, the diglycine compound being capable of complexing copper ions, and water, and the composition being abrasive-free and having an acidic pH; and b) polishing the wafer with a polishing pad.