Substrate with a piezoelectric thin film
View Patent ↗A substrate has a first thermal expansion coefficient and a piezoelectric thin film has a second thermal expansion coefficient. The piezoelectric thin film is mainly composed of a potassium sodium niobate (K,Na)NbO 3 with a perovskite structure. A curvature radius of a warping of the substrate provided with the piezoelectric thin film due to difference between the first and the second thermal expansion coefficients is 10 m or more at room temperature.
1. A substrate with a piezoelectric thin film, comprising:
the substrate having a first thermal expansion coefficient; and
the piezoelectric thin film having a second thermal expansion coefficient and being formed above the substrate, the piezoelectric thin film comprising a potassium sodium niobate expressed by a general formula (K,Na)NbO 3 with a perovskite structure,
wherein a curvature radius of a warping of the substrate provided with the piezoelectric thin film due to a difference between the first and the second thermal expansion coefficients is 10 m or more at a room temperature,
wherein the piezoelectric thin film has a thickness of 0.2 μm to 10 μm,
wherein the piezoelectric thin film is oriented in one of plane orientations (001), (110), and (111), and
wherein the (K,Na)NbO 3 composing the piezoelectric thin film has an average grain size within a range of 0.1 μm to 1.0 μm.
2. The substrate with the piezoelectric thin film according to claim 1 , wherein the substrate comprises a Si substrate.
3. The substrate with the piezoelectric thin film according to claim 1 , wherein the substrate comprises a Ge substrate.
4. The substrate with the piezoelectric thin film according to claim 1 , wherein the substrate comprises a GaAs substrate.
5. The substrate with the piezoelectric thin film according to claim 1 , further comprising:
a lower electrode between the piezoelectric thin film and the substrate; and
an upper electrode formed on an opposite surface of the piezoelectric film with respect to a surface contacting with the lower electrode,
wherein at least one of the upper electrode and the lower electrode contains Pt.
6. The substrate with the piezoelectric thin film according to claim 1 , further comprising:
a layer having a perovskite structure between a lower electrode and the piezoelectric thin film.
7. The substrate with the piezoelectric thin film according to claim 6 , wherein the layer having the perovskite structure comprises a compound selected from a group consisting of KNbO 3 , NaNbO 3 , LaNiO 3 , SrRuO 3 , and SrTiO 3 .
8. The substrate with the piezoelectric thin film according to claim 1 , wherein the piezoelectric thin film comprises (K,Na)NbO 3 having a composition within a range of 0.4≦Na/(K+Na)≦0.75.
9. The substrate with the piezoelectric thin film according to claim 1 , wherein the piezoelectric thin film contains an element other than K, Na, Nb, and O.
10. The substrate with the piezoelectric thin film according to claim 9 , wherein a content of the element other than K, Na, Nb, and O in the piezoelectric thin film is 10% or less.
11. The substrate with the piezoelectric thin film according to claim 9 , wherein the element other than K, Na, Nb, and O comprises lithium or tantalum.
12. The substrate with the piezoelectric thin film according to claim 1 , wherein the first thermal expansion coefficient is from 2.6×10 −6 /° C. to 6.1×10 −6 /° C. and the second thermal expansion coefficient is from 5.5×10 −6 /° C. to 6.5×10 −6 /° C.
13. A substrate with a piezoelectric thin film, comprising:
the substrate having a first thermal expansion coefficient; and
the piezoelectric thin film having a second thermal expansion coefficient and being formed above the substrate, the piezoelectric thin film comprising a potassium sodium niobate expressed by a general formula (K,Na)NbO 3 with a perovskite structure, the piezoelectric thin film being formed at a substrate temperature lower than 600° C.,
wherein a curvature radius of a warping of the substrate provided with the piezoelectric thin film due to a difference between the first and the second thermal expansion coefficients is 10 m or more at a room temperature.
14. The substrate with a piezoelectric thin film according to claim 13 , wherein the piezoelectric thin film is formed by RF magnetron sputtering method.
15. The substrate with a piezoelectric thin film according to claim 13 , wherein the piezoelectric thin film has a thickness of 0.2 μm to 10 μm.
16. The substrate with the piezoelectric thin film according to claim 13 , wherein the piezoelectric thin film is oriented in one of plane orientations (001), (110), and (111).
17. The substrate with the piezoelectric thin film according to claim 13 , wherein the (K,Na)NbO 3 composing the piezoelectric thin film has an average grain size within a range of 0.1 μm to 1.0 μm.
18. The substrate with the piezoelectric thin film according to claim 13 , wherein the first thermal expansion coefficient is from 2.6×10 −6 /° C. to 6.1×10 −6 /° C. and the second thermal expansion coefficient is from 5.5×10 −6 /° C. to 6.5×10 −6 /° C.