Laser diode epitaxial wafer and method for producing same
View Patent ↗A laser diode epitaxial wafer has an n-type GaAs substrate, an n-type cladding layer formed on the n-type GaAs substrate, an active layer formed on the n-type cladding layer, and a p-type cladding layer formed on the active layer. The n-type cladding layer, the active layer, and the p-type cladding layer are formed of an AlGaInP-based material. The p-type cladding layer has carbon as a p-type impurity. The p-type cladding layer has a carrier concentration in the range of not less than 8.0×10 17 cm −3 and not more than 1.5×10 18 cm −3 .
1. A laser diode epitaxial wafer production method, comprising:
supplying, to a heated n-type GaAs substrate, group III and V raw material gases, a carrier gas, and dopant raw material gases; and
epitaxially growing, on the n-type GaAs substrate, an n-type cladding layer, an active layer, a p-type cladding layer, and a GaAs cap layer,
wherein the epitaxially grown n-type cladding layer, the active layer, and the p-type cladding layer each comprises an AlGaInP-based material and has a double-hetero structure,
wherein during the growing of the p-type cladding layer, carbon tetrabromide is supplied as a dopant raw material gas to allow the p-type cladding layer to comprise a carrier concentration in a range of not less than 8.0×10 17 cm −3 and not more than 1.5×10 18 cm −3 ,
wherein during the growing of the n-type cladding layer, a silicon doping raw material gas is supplied as a dopant raw material gas to dope the n-type cladding layer with silicon, and
wherein during the growing of the GaAs cap layer, zinc is supplied as a dopant raw material gas to allow the GaAs cap layer to comprise a carrier concentration in a range of at least 1.0×10 19 cm −3 .
2. The laser diode epitaxial wafer production method according to claim 1 , wherein the p-type cladding layer comprises a carrier concentration in a range of not less than 9.0×10 17 cm −3 and not more than 1.2×10 18 cm −3 .
3. The laser diode epitaxial wafer production method according to claim 1 , wherein the p-type cladding layer comprises a carrier concentration distribution in a depth direction thereof of within ±5%.
4. The laser diode epitaxial wafer production method according to claim 1 , wherein the active layer comprises an undoped active layer and a carrier concentration of not more than 7.0×10 16 cm −3 .
5. The laser diode epitaxial wafer production method according to claim 1 , wherein during the growing of the n-type cladding layer, silicon is supplied as the dopant raw material gas to allow the n-type cladding layer to comprise a target carrier concentration of 8.0×10 17 cm −3 .
6. The laser diode epitaxial wafer production method according to claim 1 , further comprising:
forming an undoped guide layer comprising AlGaInP between the active layer and the p-type cladding layer.
7. The laser diode epitaxial wafer production method according to claim 1 , wherein a growth temperature during the epitaxial growth is 800° C.