CMOS image sensor and method for fabricating the same
View Patent ↗A CMOS image sensor and a method for fabricating the same are disclosed, in which light that transmits through a microlens is prevented from being beyond a photodiode region to minimize loss of incident light and to improve low illumination characteristics of the CMOS image sensor. The CMOS image sensor includes a semiconductor substrate including a transistor region and a photodiode region, a gate electrode formed on the semiconductor substrate corresponding to the transistor region, an interlayer dielectric layer formed on an entire surface of the semiconductor substrate including the gate electrode, a microlens formed over the interlayer dielectric layer to condense light, and a metal barrier formed in the interlayer dielectric layer to surround a portion of the interlayer dielectric layer corresponding to the photodiode region and to reflect light in the photodiode region that transmits through the microlens but goes beyond the photodiode region.
1. A CMOS image sensor comprising:
a semiconductor substrate including a transistor region and a photodiode region;
a gate electrode formed on the semiconductor substrate corresponding to the transistor region;
an interlayer dielectric layer formed on an entire surface of the semiconductor substrate including the gate electrode;
a microlens formed over the interlayer dielectric layer to condense light;
a metal barrier formed in the interlayer dielectric layer to surround a portion of the interlayer dielectric layer corresponding to the photodiode region and to reflect light in the photodiode region that transmits through the microlens but goes beyond the photodiode region;
a metal line formed between the interlayer dielectric layer and the microlens; and
a contact formed in the interlayer dielectric layer to electrically and directly connect the gate electrode with the metal line.
2. The CMOS image sensor of claim 1 , wherein the metal barrier and the contact are formed of the same metal.
3. The CMOS image sensor of claim 2 , wherein the metal barrier and the contact are formed of W or Al.
4. The CMOS image sensor of claim 1 , wherein the metal barrier and the contact are formed of different metals.
5. The CMOS image sensor of claim 4 , wherein the metal barrier and the contact are formed of W or Al.