Probe resistance measurement method and semiconductor device with pads for probe resistance measurement
View Patent ↗A probe resistance measuring method includes measuring first resistances at three or more nodes by making contact at least a part of a plurality of probes of a probe unit with three or more pads for resistance measurement based on a first correspondence relation. The measured resistances are stored as a first measurement result and contact resistances of the plurality of probes of the probe unit are calculated based on the first measurement result.
1. A semiconductor device with pads for probe resistance measurement, comprising:
three or more pads electrically isolated from a semiconductor circuit formed on a semiconductor substrate;
wiring lines provided to connect between said pads in series and having a same resistance; and
at least one of an alignment related pattern used to measure an alignment reference position of said semiconductor circuit and an alignment error when said semiconductor circuit is formed on said semiconductor substrate, a step monitor related pattern used to measure a size or a thickness, or said semiconductor circuit,
wherein said three or more pads are arranged in an area where said alignment related pattern, said step monitor related pattern or said semiconductor circuit is formed.