Semiconductor integrated circuit
View Patent ↗This invention is directed to improve the electrostatic discharge strength and the latch-up strength of the semiconductor integrated circuit. To achieve the certain level of stable quality of the semiconductor integrated circuit by eliminating the variety in the electrostatic discharge strength and the latch-up strength is also aimed. The first NPN type bipolar transistor 3 and the second NPN type bipolar transistor 4 in the electrostatic discharge protection cell EC 1 are surrounded by the isolation region 6 made of the P+ type semiconductor layer and electronically isolated from other elements. The width WB 1 of the isolating region 6 is larger than the width WB 2 of the isolation region 7 that separates the elements comprising the internal circuit 50 from each other. This configuration can efficiently improve the electrostatic discharge strength and the latch-up strength. It is preferred that the width WB 1 of the isolation region 6 is twice as large as the width WB 2 of the isolation region 7 (usually, it is designed to minimize the size of the semiconductor integrated circuit) in order to efficiently improve the dielectric strength and the latch-up strength.
1. The semiconductor integrated circuit comprising:
a semiconductor layer;
an internal circuit formed in the semiconductor layer and comprising a plurality of device elements;
a pad connected to the internal circuit and receiving an input signal to the internal circuit or an output signal from the internal circuit;
an electrostatic discharge protection device connected to the pad and formed in the semiconductor layer so as to protect the internal circuit from electrostatic discharge;
a first isolation region formed in the semiconductor layer and surrounding the electrostatic discharge protection device; and
a second isolation region formed in the semiconductor layer and separating the device elements from each other,
wherein a width of the first isolation region is larger than a width of the second isolation region.
2. The semiconductor integrated circuit of claim 1 , wherein the electrostatic discharge protection device is of a rectangular shape, and the first isolation region surrounds the electrostatic discharge protection device from all four sides of the electrostatic discharge protection device.
3. The semiconductor integrated circuit of claim 1 , wherein the width of the first isolation region is twice as large as the width of the second isolation region.
4. The semiconductor integrated circuit of claim 1 , wherein the first isolation region is grounded through a metal wiring.
5. The semiconductor integrated circuit of claim 1 , wherein the electrostatic discharge protection device and the first isolation region are combined as one unit to form an electrostatic discharge protection cell, and the semiconductor integrated circuit comprises a plurality of the electrostatic discharge protection cells.
6. The semiconductor integrated circuit of claim 1 , wherein the electrostatic discharge protection device comprises a bipolar transistor, a diode or a MOS transistor.
7. The semiconductor integrated circuit of claim 2 , wherein the first isolation region has the same width on all four sides of the electrostatic discharge protection device.
8. The semiconductor integrated circuit of claim 7 , wherein the same width is larger than 3 μm.