Techniques for arranging solder balls and forming bumps
View Patent ↗A mask having a plurality of through holes and a mold having a plurality of cavities are provided, and the through holes and the cavities are aligned. Conductive balls are dispensed into the aligned through holes and cavities Substantially one ball is dispensed into each aligned through hole and cavity, and the mask with the holes and the cavities in the mold are configured and dimensioned such that the balls are substantially flush with, or recessed below, an outer surface of the mask. The mask is removed, the conductive balls are aligned with pads of a semiconductor device, and the conductive balls are transferred to the pads by fluxless reflow in a formic acid environment. Vibrational, electrostatic, and direct transfer aspects are also disclosed.
1. A method comprising the steps of:
providing a mask having a plurality of through holes and a silicon mold having a plurality of cavities;
aligning said through holes and said cavities;
dispensing preformed conductive balls into said aligned through holes and cavities, said preformed conductive balls having a diameter e, substantially one preformed conductive ball to each aligned through hole and cavity, said cavities of said mold comprising pits having an opening diameter ranging from about e to about 2e and having tapered side walls with a tapered side wall angle controlled such that upon removal of said mask from said mold, said preformed conductive balls extend beyond said outer surface of said mold and are immobile in said mold, said mask with said holes and said cavities in said mold being configured and dimensioned such that:
said preformed conductive balls are one of substantially flush with, and recessed below, an outer surface of said mask under conditions of said alignment of said through holes and said cavities; and
upon removal of said mask from said mold, said preformed conductive balls extend beyond an outer surface of said mold;
removing said mask from said mold so that said preformed conductive balls extend beyond said outer surface of said mold;
aligning said preformed conductive balls with pads of a semiconductor device; and
transferring said preformed conductive balls to said pads by fluxless reflow in a formic acid environment.
2. The method of claim 1 , wherein said preformed conductive balls comprise solder balls with a liquidus temperature of at least about 250 degrees Centigrade.
3. The method of claim 2 , wherein said dispensing comprises at least use of a squeeze brush.
4. The method of claim 2 , wherein said dispensing comprises at least vibration of said mask and mold.
5. The method of claim 2 , wherein said dispensing comprises at least air flow from a location outward from said mask.
6. The method of claim 2 , wherein said mask is formed from at least one of glass, ceramic, silicon, and polymer.
7. The method of claim 2 , wherein said mold is formed from at least one of glass and silicon.
8. The method of claim 2 , wherein said preformed conductive balls have a diameter and wherein said through holes have a diameter of about 100 percent to about 195 percent of said diameter of said balls.
9. A method comprising the steps of:
providing a mask having a plurality of through holes and a glass mold having a plurality of cavities;
aligning said through holes and said cavities;
dispensing preformed conductive balls into said aligned through holes and cavities, said preformed conductive balls having a diameter e, substantially one preformed conductive ball to each aligned through hole and cavity, said cavities of said mold comprise rounded cavities having a depth of from about thirty percent of e to about ninety five percent of e, said mask with said holes and said cavities in said mold being configured and dimensioned such that:
said preformed conductive balls are one of substantially flush with, and recessed below, an outer surface of said mask under conditions of said alignment of said though holes and said cavities; and
upon removal of said mask from said mold, said preformed conductive balls extend beyond an outer surface of said mold;
removing said mask from said mold so that said preformed conductive balls extend beyond said outer surface of said mold;
aligning said preformed conductive balls with pads of a semiconductor device; and
transferring said preformed conductive balls to said pads by fluxless reflow in a formic acid environment.
10. The method of claim 9 , wherein said preformed conductive balls comprise solder balls with a liquidus temperature of at least about 250 degrees Centigrade.
11. The method of claim 9 , wherein said dispensing comprises at least use of a squeeze brush.
12. The method of claim 9 , wherein said dispensing comprises at least vibration of said mask and mold.
13. The method of claim 9 , wherein said dispensing comprises at least air flow from a location outward from said mask.
14. The method of claim 9 , wherein said mask is formed from at least one of glass, ceramic, silicon, and polymer.
15. The method of claim 9 , wherein said mold is formed from at least one of glass and silicon.
16. The method of claim 9 , wherein said preformed conductive balls have a diameter and wherein said through holes have a diameter of about 100 percent to about 195 percent of said diameter of said balls.