IP Library Granted Patent US 7,541,215
Granted Patent B2
US 7,541,215 · App. 12/122,172 · Granted Jun 2, 2009

Image sensor and method for manufacturing the same

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Quick Facts
Patent No.
US 7,541,215
App. No.
12/122,172
Granted
Jun 2, 2009
Kind
B2
Abstract

An image sensor and a method for manufacturing the same are provided. The image sensor comprises a pixel region defined on a substrate, an interlayer dielectric on the substrate and comprising a trench above the pixel region, a color filter within the trench, and a microlens on the color filter.

Claims (18)

1. An image sensor comprising:

a pixel region defined on a substrate;

an interlayer dielectric on the substrate, the interlayer dielectric comprising a trench above the pixel region;

a color filter within the trench;

a planarization layer on the color filter, and a microlens on the color filter, wherein a top surface of the interlayer dielectric and an underside of the microlens are at the same height.

2. The image sensor according to claim 1 , wherein the microlens is on the planarization layer.

3. The image sensor according to claim 1 , wherein a depth of the trench is equal to a sum of the thicknesses of the color filter and the planarization layer.

4. A method for manufacturing an image sensor, the method comprising:

defining a pixel region on a substrate;

forming an interlayer dielectric on the substrate;

forming a trench in the interlayer dielectric corresponding to the pixel region;

forming a color filter in the trench;

forming a planarization layer on the color filter; and

forming a microlens on the color filter, wherein forming the microlens comprises forming the microlens such that a top surface of the interlayer dielectric and an underside of the microlens are at the same height.

5. The method according to claim 4 , wherein forming the trench comprises selectively etching the interlayer dielectric above the pixel region.

6. The method according to claim 4 , wherein the microlens is formed on the planarization layer.

7. The method according to claim 4 ,

wherein forming the trench comprises selectively etching the interlayer dielectric above the pixel region until the trench has a depth equal to a sum of the thicknesses of the color filter and the planarization layer.

Assignments (5)
CHANGE OF NAME Recorded Nov 3, 2021
From: CONVERSANT INTELLECTUAL PROPERTY INC.
To: MOSAID TECHNOLOGIES INCORPORATED
Reel/Frame 058793/0748 →
RELEASE OF SECURITY INTEREST Recorded Nov 11, 2020
From: CPPIB CREDIT INVESTMENTS INC.
To: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
Reel/Frame 054385/0435 →
AMENDED AND RESTATED U.S. PATENT SECURITY AGREEMENT (FOR NON-U.S. GRANTORS) Recorded Aug 22, 2018
From: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
To: CPPIB CREDIT INVESTMENTS, INC.
Reel/Frame 046900/0136 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2017
From: DONGBU HITEK CO. LTD.; DONGBU ELECTRONICS CO., LTD.
To: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
Reel/Frame 041330/0143 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 21, 2008
From: PARK, JIN HO
To: DONGBU HITEK CO., LTD.
Reel/Frame 020978/0392 →