Semiconductor device including thermally dissipating dummy pads
A semiconductor device capable of improving the efficiency of dispersing heat via a dummy pad. The semiconductor device may be included in a semiconductor package, stack module, card, or system. Also disclosed is a method of manufacturing the semiconductor device. In the semiconductor device, a semiconductor substrate has a first surface and a second surface opposite to the first surface, and at least one conductive pad is arranged on a predetermined region of the first surface. At least one dummy pad is arranged on the first or second surface, and is not electrically coupled to the at least one conductive pad. The dummy pad or pads may be used to disperse heat. Accordingly, it is possible to increase the efficiency of dispersing heat of a semiconductor device, thereby improving the yield of semiconductor devices.
1. A semiconductor device comprising:
a semiconductor substrate having circuit structure;
an insulating material on the circuit structure;
at least one conductive pad on a surface of the insulating material, the conductive pad being electrically connected to the circuit structure;
a plurality of heat conductors on the surface of the insulating material and electrically isolated from the circuit structure, the heat conductors for dissipating heat and arranged adjacent to the at least one conductive pad,
wherein heat conductors are arranged in the form of a lattice pattern to thereby define a heat conductor pattern.
2. The semiconductor device of claim 1 , wherein the at least one conductive pads includes a plurality of conductive pads on opposite edges of the semiconductor substrate to define an edge pad structure, and wherein the plurality of heat conductors comprise:
elongate first heat conductors located on a central region of the insulating material between the conductive pads of the edge pad structure;
second heat conductors located on opposite sides the first heat conductors on the insulating material and between the conductive pads of the edge pad structure, wherein the second heat conductors are smaller than the elongate first heat conductors; and
metal lines thermally connecting the elongated first heat conductors and the second heat conductors.
3. The semiconductor device of claim 1 , wherein the at least one conductive pads includes a plurality of conductive pads in a central region of the semiconductor substrate to define an center pad structure, and wherein the plurality of heat conductors comprise:
a plurality of first heat conductors arranged on one side of the center pad structure;
a plurality of second heat conductors arranged an opposite side of the center pad structure;
first metal lines thermally connecting the first heat conductors; and
second metal lines thermally connecting the second heat conductors.