IP Library Granted Patent US 8,230,593
Granted Patent B2
US 8,230,593 · App. 12/156,131 · Granted Jul 31, 2012

Probe bonding method having improved control of bonding material

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Quick Facts
Patent No.
US 8,230,593
App. No.
12/156,131
Granted
Jul 31, 2012
Kind
B2
Abstract

In assembly of probe arrays for electrical test, a problem can arise where a bonding agent undesirably wicks between probes. According to embodiments of the invention, this wicking problem is alleviated by disposing an anti-wicking agent on a surface of the probe assembly such that wicking of the bonding agent along the probes toward the probe tips is hindered. The anti-wicking agent can be a solid powder, a liquid, or a gel. Once probe assembly fabrication is complete, the anti-wicking agent is removed. In preferred embodiments, a template plate is employed to hold the probe tips in proper position during fabrication. In this manner, undesirable bending of probes caused by introduction or removal of the anti-wicking agent can be reduced or eliminated.

Claims (35)

1. A method for fabricating a probe assembly comprising:

forming a bonding cavity;

passing a plurality of probes through the bonding cavity;

filling the bonding cavity with a bonding agent;

disposing an anti-wicking agent on a surface of the bonding agent in the bonding cavity; and

curing the bonding agent in the bonding cavity; and removing the anti-wicking agent.

2. The method of claim 1 further comprising providing a guide plate assembly having a first guide plate separated from a second guide plate by a spacer, the guide plate assembly defining the bonding cavity.

3. The method of claim 2 further comprising disposing holes in the first and second guide plates.

4. The method of claim 3 further comprising disposing the probes in the holes.

5. The method of claim 4 further comprising providing gaps between the probes and the guide plates at the holes between 5 μm and 40 μm.

6. The method of claim 4 comprising lateral spacing of the probes less than about 150 μm.

7. The method of claim 3 further comprising aligning the first and second guide plates using corresponding first and second hole patterns.

8. The method of claim 3 wherein the filling the bonding cavity comprises introducing the bonding agent through the holes.

9. The method of claim 1 further comprising facing probe tip sections the same way relative to the guide plate assembly.

10. The method of claim 1 comprising boding with a material selected from the group consisting of epoxy, thermally set material, molten plastic, and injection molding material.

11. The method of claim 1 further comprising:

providing a probe tip template; and

engaging a tip section of each of the plurality of probes with the probe tip template prior to disposing the anti-wicking agent.

12. The method of claim 11 wherein the probe tip template comprises a material selected from the group consisting of polyimide, ceramic, and metal.

13. The method of claim 1 wherein curing comprises heating.

14. The method of claim 1 wherein removing the anti-wicking agent comprises vacuuming out the anti-wicking agent.

15. The method of claim 1 further comprising cleaning the probe assembly via ultrasonic cleaning.

16. The method of claim 1 wherein the anti-wicking agent comprises a powder.

17. The method of claim 16 wherein the bonding agent does not substantially wick into the powder.

18. The method of claim 1 wherein the anti-wicking agent comprises talc.

19. The method of claim 1 wherein the anti-wicking agent comprises starch flour.

20. The method of claim 1 wherein the anti-wicking agent comprises a powder having a particle size of about 3 μm.

21. The method of claim 1 further comprising compacting the anti-wicking agent.

22. The method of claim 1 wherein the disposing the anti-wicking agent is performed with a syringe capable of delivering the powder.

23. The method of claim 1 wherein the anti-wicking agent comprises a gel.

24. The method of claim 23 wherein the gel comprises a silicone based gel.

25. The method of claim 23 wherein the gel and bonding agent are substantially immiscible.

26. The method of claim 1 wherein the anti-wicking agent comprises a liquid.

27. The method of claim 26 wherein the liquid comprises lithography compatible masking fluid.

28. The method of claim 26 wherein the liquid and bonding agent are substantially immiscible.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Aug 7, 2025
From: HSBC BANK USA, NATIONAL ASSOCIATION
To: FORMFACTOR, INC.
Reel/Frame 072853/0001 →
SECURITY INTEREST Recorded Jul 29, 2025
From: FORMFACTOR, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 072263/0272 →
SECURITY INTEREST IN UNITED STATES PATENTS AND TRADEMARKS Recorded Jul 12, 2016
From: FORMFACTOR, INC.; ASTRIA SEMICONDUCTOR HOLDINGS, INC.; CASCADE MICROTECH, INC.; MICRO-PROBE INCORPORATED
To: HSBC BANK USA, NATIONAL ASSOCIATION
Reel/Frame 039184/0280 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 25, 2008
From: KISTER, JANUARY
To: MICROPROBE, INC.
Reel/Frame 021465/0265 →