Semiconductor fabrication process including an SiGe rework method
View Patent ↗A method for fabricating a semiconductor device includes forming an SiGe region. The SiGe region can be an embedded source and drain region, or a compressive SiGe channel layer, or other SiGe regions within a semiconductor device. The SiGe region is exposed to an SC1 solution and excess surface portions of the SiGe region are selectively removed. The SC1 etching process can be part of a rework method in which overgrowth regions of SiGe are selectively removed by exposing the SiGe to and SC1 solution maintained at an elevated temperature. The etching process is carried out for a period of time sufficient to remove excess surface portions of SiGe. The SC1 etching process can be carried out at elevated temperatures ranging from about 25° C. to about 65° C.
1. A method for fabricating a semiconductor device, the method comprising:
forming a compressive SiGe region by an expitaxial deposition process to a first thickness and in proximity to an active region of the semiconductor device,
wherein the expitaxial deposition process produces excess SiGe beyond a required amount;
exposing the SiGe region to an SC1 solution a temperature of at least about 45° C.; and
selectively removing an excess surface portion of the compressive SiGe region, while avoiding the removal of substantial portions of the active region.
2. The method of claim 1 , wherein forming a compressive SiGe region comprises forming an embedded SiGe region in a recess of a semiconductor substrate.
3. The method of claim 1 , wherein forming a compressive SiGe region comprises forming an SiGe layer in proximity to a transistor channel region.
4. The method of claim 1 , wherein exposing the SiGe region to an SC1 solution comprises exposing to an SC1 solution at a temperature of about 45° C. to about 65° C.
5. The method of claim 2 , wherein forming a compressive SiGe region to a first thickness comprises overfilling the recess.
6. The method of claim 5 , wherein selectively removing an excess surface portion of the compressive SiGe region comprises removing surface portions of the compressive SiGe region such that the compressive SiGe region is substantially flush with a top portion of the recess.
7. In a semiconductor fabrication process, a rework method to avoid scrapping a semiconductor substrate, the method comprising:
forming an SiGe region in the semiconductor substrate to a first thickness greater than a target thickness;
measuring the first thickness;
comparing the first thickness to the target thickness; and
exposing the SiGe region to an SC1 solution at a solution temperature and for a period of time sufficient to reduce the thickness of the SiGe region to about the target thickness, while avoiding the removal of substantial portions of the semiconductor substrate.
8. The method of claim 7 , wherein exposing the SiGe region to an SC1 solution comprises exposing the SiGe region to an SC1 solution at a temperature of at least about 45° C.
9. The method of claim 7 , wherein forming an SiGe region comprises forming embedded transistor source and drain regions.
10. The method of claim 7 , wherein exposing the SiGe region to an SC1 solution comprises reducing the thickness of the SiGe region comprises removing an overgrowth of SiGe.
11. The method of claim 7 , wherein forming an SiGe region comprises forming an SiGe layer in proximity to a transistor channel region.
12. The method of claim 11 , wherein exposing the SiGe region to an SC1 solution comprises to reduce the thickness of the SiGe region comprises removing an overgrowth of SiGe.
13. A method for reworking an SiGe formation process to avoid scrapping the semiconductor substrate, the method comprising:
forming an overgrowth of SiGe beyond a required amount of SiGe;
exposing the SiGe overgrowth to an SC1 solution at an elevated temperature of at least about 45° C.;
removing the SiGe overgrowth while avoiding substantial removal of other semiconductor material located in proximity to the SiGe overgrowth; and
continuing to process the semiconductor substrate.
14. The method of claim 13 , wherein forming an overgrowth of SiGe comprises forming an embedded SiGe region in a recess of the semiconductor substrate.
15. The method of claim 13 , wherein forming a SiGe overgrowth comprises forming an SiGe layer in proximity to a transistor channel region.
16. The method of claim 13 , wherein exposing the SiGe overgrowth to an SC1 solution comprises exposing the SiGe overgrowth to an SC1 solution at a temperature of about 45° C. to about 65° C.
17. The method of claim 14 , wherein removing the overgrowth comprises removing surface portions of the embedded SiGe region such that the SiGe region is substantially flush with a top portion of the recess.
18. The method of claim 15 , wherein removing the SiGe overgrowth comprises removing a lateral overgrowth.
19. A method for reworking of a semiconductor substrate having an overgrowth of SiGe beyond a required amount of SiGe, the method comprising:
preparing an SC1 solution;
controlling the temperature of the SC1 solution to a predetermined temperature above room temperature;
measuring an SiGe etch rate of the SC1 solution;
exposing the SC1 solution to the SiGe overgrowth at the predetermined temperature for a predetermined period of time based on the SiGe etch rate; and
selectively removing the SiGe overgrowth while avoiding the removal of substantial portions of the semiconductor substrate.