Packaging an integrated circuit die with backside metallization
View Patent ↗A method ( 32 ) of packaging integrated circuit (IC) dies ( 48 ) includes applying ( 36 ) a laminating material ( 44 ) to a wafer ( 40 ), and separating ( 46 ) the wafer ( 40 ) into multiple IC dies ( 48 ) such that the laminating material ( 44 ) is applied to back surfaces ( 52 ) of the IC dies ( 48 ). Each of the IC dies ( 48 ) is positioned ( 62 ) with an active surface ( 50 ) facing a support substrate ( 56 ). An encapsulant layer ( 72 ) is formed ( 64 ) overlying the laminating material ( 44 ) and the back surfaces ( 52 ) of the IC dies ( 48 ) from a molding compound ( 66 ). The molding compound ( 66 ) and the laminating material ( 44 ) are removed from the back surfaces ( 52 ) of the IC dies ( 48 ) to form ( 76 ) openings ( 78 ) exposing the back surfaces ( 52 ). Conductive material ( 84, 88 ) is placed in the openings ( 78 ) and functions as a heat sink and/or a ground for the IC dies ( 48 ).
1. A method of packaging an integrated circuit (IC) die, said IC die having a first surface and a second surface, said first surface being an active side of said IC die, and said method comprising:
applying a laminating material to said second surface of said IC die;
positioning said active surface of said IC die on a support substrate;
following said positioning operation, forming an encapsulant layer overlying said laminating material and said IC die, said encapsulant layer being formed from a molding compound;
removing said molding compound and said laminating material from said second surface of said IC die to form an opening exposing said second surface;
placing a conductive material in said opening; and
releasing said IC die from said support substrate following said placing operation.
2. A method as claimed in claim 1 wherein said IC die is one of multiple IC dies formed on a wafer substrate, said wafer substrate having a backside, and:
said applying operation comprises applying said laminating material to said backside of said wafer substrate, such that said laminating material is applied to said second surface of each of said multiple IC dies; and
said method further comprises separating said wafer substrate into discrete ones of said multiple IC dies prior to said forming operation.
3. A method as claimed in claim 1 wherein said laminating material is a dry film.
4. A method as claimed in claim 1 wherein said removing operation comprises utilizing a laser device to remove said molding compound and said laminating material.
5. A method as claimed in claim 1 wherein said removing operation comprises etching said molding compound and said laminating material to form said opening.
6. A method as claimed in claim 1 wherein said removing operation produces said opening that exposes substantially an entirety of said second surface.
7. A method as claimed in claim 1 wherein said placing operation comprises filling said opening with said conductive material and forming a planar top surface spaced apart from said second surface of said IC die by said conductive material.
8. A method as claimed in claim 1 further comprising attaching a mold frame to an exposed side of said support substrate, and said active surface of said IC die is positioned on said support substrate within said mold frame.
9. A method as claimed in claim 1 wherein said IC die is one of multiple IC dies, and said method further comprises:
positioning said active surface of each of said multiple IC dies on said support substrate;
concurrently forming said encapsulant layer overlying said laminating material on each of said multiple IC dies to produce a panel;
removing said molding compound and said laminating material from said second surface of said each of said multiple IC dies to form said opening exposing said second surface of said each of said multiple IC dies;
placing said conductive material in said opening of said each of said multiple IC dies; and
separating said multiple IC dies of said panel to form individual IC packages.
10. A method of packaging an integrated circuit (IC) die, said IC die having a first surface and a second surface, said first surface being an active side of said IC die, and said method comprising:
applying a laminating material to said second surface of said IC die;
forming an encapsulant layer overlying said laminating material and said IC die, said encapsulant layer being formed from a molding compound;
removing said molding compound and said laminating material from said second surface of said IC die to form multiple openings exposing a section of said second surface in a pre-determined pattern; and
placing a conductive material in said opening.
11. A method of packaging an integrated circuit (IC) die, said IC die having a first surface and a second surface, said first surface being an active side of said IC die, and said method comprising:
applying a laminating material to said second surface of said IC die;
forming an encapsulant layer overlying said laminating material and said IC die, said encapsulant layer being formed from a molding compound;
removing said molding compound and said laminating material from said second surface of said IC die to form an opening exposing said second surface; and
placing a conductive material in said opening, said placing operation including depositing a metal film in said opening, overlaying a portion of said metal film with a nonconductive material, and forming a planar top surface spaced apart from said second surface of said IC die.
12. A method of packaging multiple integrated circuit (IC) dies, each of said multiple IC dies having a first surface and a second surface, said first surface being an active side of said each of said multiple IC dies, and said method comprising: applying a laminating material to said second surface of said each of said multiple IC dies; positioning said active surface of said each of said multiple IC dies on a support substrate; concurrently forming an encapsulant layer overlying said laminating material and said multiple IC dies, said encapsulant layer being formed from a molding compound; removing said molding compound and said laminating material from said second surface of said each of said multiple IC dies to form an opening exposing said second surface of said each of said multiple IC dies; placing a conductive material in said opening of said each of said multiple IC dies and forming a planar top surface spaced apart from said second surface of said each of said multiple IC dies by said conductive material; releasing said multiple IC dies from said support substrate as a panel following said placing operation; and separating said multiple IC dies of said panel to form individual IC packages.
13. A method as claimed in claim 12 wherein multiple IC dies are formed in a wafer substrate, said wafer substrate having a backside, and:
said applying operation comprises applying said laminating material to said backside of said wafer substrate, such that said laminating material is applied to said second surface of said each of said multiple IC dies; and
said method further comprises separating said wafer substrate into discrete ones of said multiple IC dies prior to said positioning operation.
14. A method as claimed in claim 12 wherein said placing operation comprises filling said opening with said conductive material to form said planar top surface.
15. A method as claimed in claim 12 wherein said placing operation comprises:
depositing a metal film in said opening; and
overlaying a portion of said metal film with a nonconductive material to form said planar top surface.
16. A method as claimed in claim 12 further comprising:
forming at least one first device layer on said active surface of said each of said multiple IC dies following said releasing operation; and
forming at least one second device layer overlying said planar top surface, said second device layer being in communication with said second surface of said each of said multiple IC dies via said conductive material, and said forming on said active surface and overlying said planar top surface occurring prior to said separating operation.