Method for chemical mechanical planarization of chalcogenide materials
View Patent ↗A method and associated composition for chemical mechanical planarization of a chalcogenide-containing substrate (e.g., germanium/antimony/tellurium (GST)-containing substrate) are described. The composition and method afford low defect levels (e.g., scratches incurred during polishing) as well as low dishing and local erosion levels on the chalcogenide-containing substrate during CMP processing.
1. A method for chemical mechanical planarization of a surface having at least one feature thereon comprising a chalcogenide material, said method comprising the steps of:
A) placing a substrate having the surface having the at least one feature thereon comprising a chalcogenide material in contact with a polishing pad;
B) delivering a polishing composition comprising:
a) a surface-modified abrasive having a positive zeta potential; and
b) an oxidizing agent;
and
C) polishing the substrate with the polishing composition;
wherein the chalcogenide material is removed with a removal rate of at least 895 angstroms/minute at 1.5 psi downforce.
2. The method of claim 1 wherein the chalcogenide material is an alloy comprising at least one element selected from the group consisting of germanium, antimony, tellurium, silicon, arsenic, phosphorous, indium, scandium, yttrium, lanthanum, boron, aluminum, gallium, thallium, nitrogen, bismuth, vanadium, tantalum, and niobium.
3. The method of claim 1 wherein the chalcogenide material is an alloy of germanium, antimony, and tellurium.
4. The method of claim 1 wherein the chalcogenide material is an alloy of indium, antimony, and tellurium.
5. The method of claim 1 wherein the surface-modified abrasive is selected from the group consisting of a surface-modified silica, a surface-modified alumina, a surface-modified ceria, a surface-modified titania, and combinations thereof.
6. The method of claim 5 wherein the surface-modified abrasive is a surface-modified silica.
7. The method of claim 6 wherein the surface-modified abrasive is an aluminum acetate modified silica.
8. The method of claim 1 wherein the polishing composition has a pH that is acidic and is less than 7.
9. The method of claim 1 wherein the polishing composition further comprises c) a corrosion inhibitor.
10. The method of claim 1 wherein the corrosion inhibitor is selected from the group consisting of dimethylhexyndiol and diethylenetriamine pentaacetic acid.
11. The method of claim 1 wherein the polishing composition further comprises a C 2 -C 4 carboxylic acid, wherein the C 2 -C 4 carboxylic acid is selected from acetic acid, propanoic acid, and butanoic acid.
12. The method of claim 11 wherein the C 2 -C 4 carboxylic acid is acetic acid.
13. The method of claim 1 wherein the surface-modified abrasive having a positive zeta potential is an abrasive that has initially been surface-modified with an inorganic compound and subsequently surface-modified with an organic ligand.
14. The method of claim 13 wherein the inorganic compound is boric acid.
15. The method of claim 13 wherein the organic ligand is bicine.