Non-volatile memory device and method for fabricating the same
View Patent ↗A non-volatile memory device and a method for fabricating the same are provided. The method includes: forming a gate structure on a substrate, the gate structure including a first insulation layer, a first electrode layer for a floating gate and a second insulation layer; forming a third insulation layer on the gate structure covering predetermined regions of the substrate adjacent to the gate structure; and forming a second electrode layer for a control gate on the third insulation layer disposed on sidewalls of the gate structure and the predetermined regions of the substrate.
1. A non-volatile memory device, comprising:
a plurality of gate structures formed on a substrate, each gate structure including an electrode layer for a floating gate;
a gate structure insulation layer covering the gate structures and active regions located at each side of the gate structures;
a plurality of control gates formed on the gate structure insulation layer located at each side of the floating gates by performing an etch-back process; and
a salicide layer formed in a chip area including the plurality of control gates on the gate structure insulation layer located at each side of the floating gates.
2. The non-volatile memory device of claim 1 , wherein each control gate is formed to encompass each side of the floating gates.
3. The non-volatile memory device of claim 2 , wherein the floating gates and the control gates include a material selected from a group consisting of polysilicon, amorphous silicon, tungsten, tungsten silicide, and titanium.
4. The non-volatile memory device of claim 1 , wherein the control gates are connected to each other.
5. The non-volatile memory device of claim 4 , wherein each control gate is used to connect word lines in a unit of one byte or a predetermined number of bytes.
6. The non-volatile memory device of claim 1 , wherein:
each gate structure includes a tunneling oxide layer and a second insulation layer; and
the floating gates are formed between the tunneling oxide layer and the second insulation layer.
7. The non-volatile memory device of claim 6 , wherein the gate structure insulation layer and the second insulation layer include a material selected from a group consisting of oxide, nitride, and a combination thereof.
8. The non-volatile memory device of claim 6 , wherein the tunneling oxide layer has a thickness ranging from approximately 70 Å to approximately 100 Å.
9. The non-volatile memory device of claim 6 , wherein the second insulation layer has a thickness ranging from approximately 500 Å to approximately 2,000 Å.
10. The non-volatile memory device of claim 6 , wherein the second insulation layer is formed between the floating gates and the gate structure insulation layer.
11. The non-volatile memory device of claim 1 , wherein the floating gates have a thickness ranging from approximately 1,000 Å to approximately 5,000 Å.
12. The non-volatile memory device of claim 1 , wherein the plurality of control gates is formed other than over the floating gates.
13. A non-volatile memory device, comprising:
floating gate formed on a substrate;
a plurality of control gates formed on the substrate and on opposing sides of the floating gate;
a gate structure insulation layer covering the floating gate and separating each of the control gates from the floating gate and the substrate; and
a salicide layer formed in a chip area, the chip area comprising the plurality of control gates.
14. The non-volatile memory device of claim 13 , wherein the control gates surround the opposing sides of the floating gate.
15. The non-volatile memory device of claim 13 , wherein the control gates are connected to each other to surround the opposing sides of the floating gate.
16. The non-volatile memory device of claim 13 , wherein the salicide layer is formed over an entirety of the chip area.
17. The non-volatile memory device of claim 13 , further comprising:
a tunneling oxide layer disposed between the substrate and the floating gate.
18. The non-volatile memory device of claim 17 , further comprising:
a second insulation layer covering a side of the floating gate that is facing in an opposite direction from a side of the floating gate disposed on the tunneling oxide layer.
19. The non-volatile memory device of claim 18 , wherein the floating gate is formed between the tunneling oxide layer and the second insulation layer.
20. The non-volatile memory device of claim 13 , further comprising:
a second insulation layer covering a side of the floating gate that is facing in an opposite direction from a side of the floating gate formed over the substrate.
21. The non-volatile memory device of claim 13 , wherein the control gates have a height that is substantially equal to a height of the gate structure insulation layer.
22. The non-volatile memory device of claim 13 , wherein an upper surface of the control gates is substantially horizontally coplanar to an upper surface of the gate structure insulation layer.
23. The non-volatile memory device of claim 13 , wherein the gate structure insulation layer is formed of a material selected from a group consisting of oxide, nitride, and a combination thereof.
24. The non-volatile memory device of claim 13 , wherein the salicide layer covers outer surfaces of each of the control gates.